A single-layer permeation barrier for organic light-emitting displays

Films of a hybrid material with part-SiO2 part-silicone character are deposited as environmental barriers on bottom-emitting and on transparent organic light-emitting diodes. Devices coated with this barrier have lifetimes of up to ∼7500h when stored at 65°C and 85% relative humidity, by far exceeding the industrial requirement of 1000h. The intensity of the Si–O–Si absorption at the wavenumber of 1075cm−1, the wetting angle by water, and the indentation hardness support the interpretation of a homogeneous material with the properties of a SiO2-silicone hybrid. The films remain intact over 58600cycles of bending to ∼0.2% tensile strain.

[1]  George M. Pharr,et al.  Influences of stress on the measurement of mechanical properties using nanoindentation: Part I. Experimental studies in an aluminum alloy , 1996 .

[2]  Tae Won Kim,et al.  Ultrahigh barrier coating deposition on polycarbonate substrates , 2004 .

[3]  E. R. Fisher,et al.  Investigation of Gas Phase Species and Deposition of SiO2 Films from HMDSO/O2 Plasmas , 2006 .

[4]  Mohamed Latreche,et al.  A study of defects in ultra-thin transparent coatings on polymers , 1999 .

[5]  Tae Won Kim,et al.  Transparent hybrid inorganic/organic barrier coatings for plastic organic light-emitting diode substrates , 2005 .

[6]  F. Palumbo,et al.  GC-MS Investigation of Hexamethyldisiloxane-Oxygen Fed Plasmas , 2003 .

[7]  Paul E. Burrows,et al.  Mechanisms of Vapor Permeation Through Multilayer Barrier Films: Lag Time Versus Equilibrium Permeation , 2004 .

[8]  J. Månson,et al.  Stress controlled gas-barrier oxide coatings on semi-crystalline polymers , 2005 .

[9]  Wendy D. Bennett,et al.  Organic light-emitting devices with extended operating lifetimes on plastic substrates , 2002 .

[10]  M. Weaver,et al.  Thin-film permeation-barrier technology for flexible organic light-emitting devices , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[11]  Rudolf von Rohr,et al.  Deposition of SiOx diffusion barriers on flexible packaging materials by PECVD , 2005 .

[12]  A. Macková,et al.  Deposition of protective coatings in rf organosilicon discharges , 2007 .

[13]  R. Spontak,et al.  Morphology and gas barrier properties of thin SiO_xcoatings on polycarbonate: Correlations with plasma-enhanced chemical vapor deposition conditions , 2000 .

[14]  R. Hauert,et al.  Influence of film structure and composition on diffusion barrier performance of SiOx thin films deposited by PECVD , 2006 .

[15]  Y. Leterrier Durability of nanosized oxygen-barrier coatings on polymers , 2003 .

[16]  J. Sturm,et al.  Stress control for overlay registration in a‐Si:H TFTs on flexible organic‐polymer‐foil substrates , 2005 .