DESIGN CONSIDERATION OF LARGE-DISPLACEMENT RF MEMS TUNERS UNDER FABRICATION UNCERTAINTIES

RF MEMS capacitive tuners based on micro-corrugated diaphragms in tunable cavity resonators/filters demand for large tuning displacements and low tuning voltages. The tuning characteristics are subjected to fabrication uncertainties of residual stress and corrugation dimensions of the diaphragm. We discuss the design consideration of largedisplacement low-voltage diaphragms for reducing the effects of fabrication uncertainties by proper geometric design of the corrugations through batch-mode FEM modeling. Uncertainty quantification is performed to analyze variations of the tuning range and actuation voltage of the capacitive MEMS tuner under fabrication uncertainties.