에너지절감형 반도체 공정용 칠러에 관한 실험적 연구

Excessive heat may occur during semiconductor manufacturing process. Thus, precise control of temperature is required to maintain constant ambient-temperature and also wafer-temperature in the chamber. Compared to an industrial chiller, semiconductor chiller's power consumption is very high due to its continuous operation for a year. Considering the high power consumption, it is necessary to develop an energy efficiency chiller by optimizing operation control. The competitiveness of the domestic products is low because of its high energy consumption. Therefore, in this study, a domestic semiconductor chiller is experimentally investigated to suggest energy-saving direction by conducting load change, temperature rise and fall and control precision experiments.