Additional error sources for microscopic laser Doppler measurements

Laser-Doppler Vibrometry has been proven to be an accurate method to measure vibration amplitudes with a known error budget. Therefore, vibrometer technique is used to realize primary standards in vibration-amplitude measurements at national metrology institutes (e.g. Physikalisch Technische Bundesanstalt PTB in Germany). However, additional error sources emerge for vibrometer measurements at microscopic structures. This paper discusses two error sources that can be neglected for usual macroscopic testing but can become important for microscopic measurements.

[1]  L. Drain.  The Laser Doppler Technique , 1980 .

[2]  Alfred Link,et al.  Investigations to assess the best accuracy attainable in accelerometer calibrations , 2002, International Conference on Vibration Measurements by Laser Techniques: Advances and Applications.

[3]  William Clouser Boyd,et al.  Fundamentals of Immunology , 1958 .

[4]  Daniel Malacara,et al.  Twyman–Green Interferometer , 2006 .

[5]  J. Biegen,et al.  Calibration requirements for Mirau and Linnik microscope interferometers. , 1989, Applied optics.

[6]  J. G. Wood,et al.  Fringe spacing in interference microscopes , 1956 .

[7]  Georg Siegmund,et al.  High-precision laser vibrometers based on digital Doppler signal processing , 2002, International Conference on Vibration Measurements by Laser Techniques: Advances and Applications.

[8]  Hans-Juergen von Martens.  Evaluation of uncertainty in interferometric vibration measurements , 2000 .

[9]  M. Teich,et al.  Fundamentals of Photonics , 1991 .