Focused-Ion-Beam Fabrication of Slots in Silicon Waveguides and Ring Resonators

We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mum.

[1]  B. Garrido,et al.  Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications , 2007, 2007 4th IEEE International Conference on Group IV Photonics.

[2]  Urs Sennhauser,et al.  Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals , 2007 .

[3]  Qianfan Xu,et al.  Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material. , 2004, Optics letters.

[4]  R. Baets,et al.  Iodine enhanced focused-ion-beam etching of silicon for photonic applications , 2007 .

[5]  Lloyd M. Smith,et al.  Chemical Modification and Patterning of Iodine-Terminated Silicon Surfaces Using Visible Light , 2002 .

[6]  D. Van Thourhout,et al.  Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides , 2006, 3rd IEEE International Conference on Group IV Photonics, 2006..

[7]  Michael Hochberg,et al.  High-Q Optical Resonators in Silicon-on-Insulator-Based Slot Waveguides , 2005 .

[8]  Focused-Ion-Beam Fabricated Vertical Fiber Couplers on Silicon-on-Insulator Waveguides , 2006 .

[9]  Yoshinori Tanaka,et al.  Fabrication of Two-Dimensional Photonic Crystal Slab Point-Defect Cavity Employing Local Three-Dimensional Structures , 2006 .

[10]  Roel Baets,et al.  Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers , 2001 .

[11]  R. Baets,et al.  Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides , 2007, IEEE Photonics Technology Letters.

[12]  Markus Pollnau,et al.  Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon , 2007 .

[13]  P. Dumon,et al.  Silicon nanophotonic wire structures fabricated by 193nm optical lithography , 2007, LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings.

[14]  Qianfan Xu,et al.  Guiding and confining light in void nanostructure. , 2004, Optics letters.

[15]  P. Dumon,et al.  Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology , 2005, Journal of Lightwave Technology.