Three-Dimensional Simulation of Silicon Melt Flow in Electromagnetic Czochralski Crystal Growth

The three-dimensional silicon melt flow in Electromagnetic Czochralski (EMCZ) growth without crucible rotation was numerically investigated using the finite element method. Due to the interaction of an axial magnetic with a constant electric current passing through the melt from the growing crystal to an electrode attached to the melt surface, an electromagnetic force (EMF) was generated. The EMF significantly suppressed the buoyant convection, and created a large axially elongated vortex in the bulk melt and a small one near the electrode. In EMCZ growth, the heat and mass transfers are thus controlled mostly through the axially elongated vortex driven by the local electromagnetic force.The feature of the melt flow is in qualitative agreement with experimental observation.