论文信息 - Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation - 字舞流文

Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation

P. Petrik | A. Nassiopoulou | E. Hourdakis | L. Sygellou | S. Ladas | A. Parisini | A. Nutsch | G. Roeder | M. Wolf | J. Berg | M. Reading