Shape analysis of cylindrical micromirrors for angular focusing

In this paper, we analyze the shape of the cylindrical micromirror, which directly defines the profile of the reflecting surface, and is very important for the function on focusing. A cylindrical micromirror can converge incident rays to a real focal line after reflection, namely angular focusing. Therefore, under specific design two cylindrical micromirrors, the primary and secondary, can converge incident rays into a real focal point after twice reflection. The curved shape of micromirror, formed due to the stress-induced bending of the bilayer microstructure upon release, has been theoretically analyzed and numerically simulated. The results show that the reflecting surface, especially at boundaries, is not perfectly cylindrical, while adding longitudinal frames can make some improvement.

[1]  Weileun Fang,et al.  A novel microelectrostatic torsional actuator , 2000 .

[2]  Albert P. Pisano,et al.  Self-adjusting microstructures (SAMS) , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[3]  S. Timoshenko,et al.  Analysis of Bi-Metal Thermostats , 1925 .

[4]  Nicholas F. Borrelli.  Optical elements derived from stretched glass , 1993, Optics & Photonics.

[5]  M. Wu.  A low voltage micromachined optical switch by stress-induced bending , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[6]  R K Kostuk,et al.  Connection cube modules for optical backplanes and fiber networks. , 1997, Applied optics.

[8]  T. Hattori,et al.  Fabrication of 3-dimensionally shaped Si diaphragm dynamic focusing mirror , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.