Control of a Novel Linear-Rotary Actuator for High-Speed Pick-and-Place Application

Abstract A direct-drive electromagnetic actuator is designed with integration of linear and rotary modules in a common shaft. The two-degree-of-freedom motion is driven by two sets of single-phase coils enclosed by dual-magnet and rotary Halbach array accordingly, greatly enlarging the force/torque constants while minimised the moving mass. Moreover, with integral vacuum sensing and actuation, it is extremely suitable for high-speed pick-and-place (PnP) application. Thus, in the second part of this paper, a typical PnP process is designed with sequential motion of linear and rotary axes with s-curve command. It is also proved that the proportional-integralderivative (PID) controllers are capable to stabilise the closed-loop dynamics even with presence of various non-linearities and disturbances in both axes, such as friction, position dependent DC gain, gravity force and counter gravity spring. The experiment test verifies that this 2-DOF actuator is capable to PnP more than 8000 integrated-circuit chips per hour with simple decentralised PID plus feedforward control.

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