A Micromachined Silicon Low-Voltage Parallel-Plate Electrokinetic Pump

Interest is increasing in the development of electrokinetic pumps capable of generating high flow rates (> 1 ml/min). These pumps are suitable for applications such as microcooler systems. Electrokinetic pumps offer the considerable advantages of simple architecture, no moving parts, low power consumption, and robust operation. Large electric potentials are typically involved in the operation of electrokinetic devices, limiting the use of silicon in such devices. We have devised a pump design that addresses this problem. The performance of test devices of this new design suggests that electrokinetic pumping is a viable option for fluid transport and fluidic actuation in silicon micromachined devices.