论文信息 - Surface Diffusion Control Enables Tailored-Aspect-Ratio Nanostructures in Area-Selective Atomic Layer Deposition. - 字舞流文

Surface Diffusion Control Enables Tailored-Aspect-Ratio Nanostructures in Area-Selective Atomic Layer Deposition.

S. Chatterjee | C. Heiliger | P. Klement | M. T. Elm | J. Schörmann | F. Michel | D. Anders | Lukas Gümbel | M. Bastianello