MAINTENANCE WITH PRODUCTION PLANNING CONSTRAINTS IN SEMICONDUCTOR MANUFACTURING

In semiconductor manufacturing, as in most manufacturing contexts, preventive maintenance is required to avoid machine failures and to ensure product quality. In this paper, we are interested in optimally planning maintenance operations given a production plan that must be satisfied. Two Integer Linear Programming models are proposed that aim at completing as many maintenance operations as possible and as late as possible, while respecting their deadlines and the capacity constraints on machines. Computational experiments on industrial data are presented and discussed.

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