Study of AFM-based nanometric cutting process using molecular dynamics

Three-dimensional molecular dynamics (MD) simulations are conducted to investigate the atomic force microscope (AFM)-based nanometric cutting process of copper using diamond tool. The effects of tool geometry, cutting depth, cutting velocity and bulk temperature are studied. It is found that the tool geometry has a significant effect on the cutting resistance. The friction coefficient (cutting resistance) on the nanoscale decreases with the increase of tool angle as predicted by the macroscale theory. However, the friction coefficients on the nanoscale are bigger than those on the macroscale. The simulation results show that a bigger cutting depth results in more material deformation and larger chip volume, thus leading to bigger cutting force and bigger normal force. It is also observed that a higher cutting velocity results in a larger chip volume in front of the tool and bigger cutting force and normal force. The chip volume in front of the tool increases while the cutting force and normal force decrease with the increase of bulk temperature.

[1]  Murray S. Daw,et al.  The embedded-atom method: a review of theory and applications , 1993 .

[2]  C. Lu,et al.  Study of Materials Deformation in Nanometric Cutting by Large-scale Molecular Dynamics Simulations , 2009, Nanoscale research letters.

[3]  Steven D. Kenny,et al.  Molecular dynamic simulations of nanoscratching of silver (100) , 2004 .

[4]  S. Yang,et al.  Atomic force microscopy-based nano-lithography for nano-patterning: a molecular dynamic study , 2004 .

[5]  Andrea Notargiacomo,et al.  Nanofabrication by scanning probe microscope lithography: A review , 2005 .

[6]  D. Rugar,et al.  Thermomechanical writing with an atomic force microscope tip , 1992 .

[7]  Tao Sun,et al.  Molecular dynamics study of scratching velocity dependency in AFM-based nanometric scratching process , 2009 .

[8]  T. Sun,et al.  Molecular dynamics study of groove fabrication process using AFM-based nanometric cutting technique , 2009 .

[9]  Tao Sun,et al.  Molecular dynamics simulation of processing using AFM pin tool , 2006 .

[10]  Steve Plimpton,et al.  Fast parallel algorithms for short-range molecular dynamics , 1993 .

[11]  J. C. Hamilton,et al.  Dislocation nucleation and defect structure during surface indentation , 1998 .

[12]  C. Weng,et al.  Nanoindentation and nanomachining characteristics of gold and platinum thin films , 2006 .

[13]  Fengzhou Fang,et al.  Nanometric cutting of copper: A molecular dynamics study , 2006 .

[14]  Foiles,et al.  Embedded-atom-method functions for the fcc metals Cu, Ag, Au, Ni, Pd, Pt, and their alloys. , 1986, Physical review. B, Condensed matter.

[15]  E. Meyer,et al.  Ripple formation induced in localized abrasion , 2003 .

[16]  Cheng-I Weng,et al.  Three-dimensional molecular dynamics analysis of processing using a pin tool on the atomic scale , 2000 .

[17]  S. Kim,et al.  Atomic scale stick-slip caused by dislocation nucleation and propagation during scratching of a Cu substrate with a nanoindenter: a molecular dynamics simulation , 2005 .

[18]  Sukky Jun,et al.  Large-scale molecular dynamics simulations of Al(111) nanoscratching , 2004 .

[19]  H. Lee,et al.  Large scale molecular dynamics study of nanometric machining of copper , 2007 .

[20]  Siu-Tsen Shen,et al.  Nanoscratch behavior of multi-layered films using molecular dynamics , 2008 .