A novel micro paramagnetic oxygen sensor based on an anisotropic magneto resistance-device

A novel gas sensor has been developed which makes use of the paramagnetic characteristics of oxygen in order to determine its concentration in a sample gas. The aim of this micro paramagnetic oxygen sensor, based on an anisotropic magneto resistance (AMR)-device, is to provide an accurate, reasonably priced and long-term stable solution for stationary and mobile oxygen measurement. The functional principle is to measure an oxygen concentration via its impact on an external magnetic field. The layout of the new micro-electro-mechanical systems (MEMS)-based sensor is kept simple with no moving parts. First measurements of a prototype show a linear response to oxygen concentrations between 0 and 100%.