Control of Microstructure and Orientation in Solution-Deposited BaTiO3 and SrTiO3 Thin Films

Columnar and highly oriented (100) BaTiO{sub 3} and SrTiO{sub 3} thin films were prepared by a chelate-type chemical solution deposition (CSD) process by manipulation of film deposition conditions and seeded growth techniques. Randomly oriented columnar films were prepared on platinum-coated Si substrates by a multilayering process in which nucleation of the perovskite phase was restricted to the substrate or underlying layers by control of layer thickness. The columnar films displayed improvements in dielectric constant and dielectric loss compared to the fine-grain equiaxed films that typically result from CSD methods. Highly oriented BaTiO{sub 3} and SrTiO{sub 3} thin films were fabricated on LaAlO{sub 3} by a seeded growth process that appeared to follow a standard two-step growth mechanism that has been previously reported. The film transformation process involved the bulk nucleation of BaTiO{sub 3} throughout the film, followed by the consumption of this matrix by an epitaxial overgrowth process originating at the seed layer. Both BaTiO{sub 3} and PbTiO{sub 3} seed layers were effective in promoting the growth of highly oriented (100) BaTiO{sub 3} films. Based on the various processing factors that can influence thin film microstructure, the decomposition pathway involving the formation of BaCO{sub 3} and TiO{sub 2} appeared tomore » dictate thin film microstructural evolution.« less

[1]  Susanne Hoffmann,et al.  Microstructure of columnar-grained SrTiO_3 and BaTiO_3 thin films prepared by chemical solution deposition , 1998 .

[2]  John D. Budai,et al.  Epitaxial YBa2Cu3O7 on Biaxially Textured Nickel (001): An Approach to Superconducting Tapes with High Critical Current Density , 1996, Science.

[3]  R. W. Schwartz,et al.  Proton and carbon-13 NMR investigations of lead zirconate titanate (Pb(Zr,Ti)O3) thin-film precursor solutions , 1993 .

[4]  R. D. Nasby,et al.  Highly Oriented, Chemically Prepared Pb(Zr, Ti)O3 Thin Films , 1993 .

[5]  L. D. Rotter,et al.  Growth of Epitaxial BaTiO 3 Thin Films at 600°C by Metalorganic Chemical Vapor Deposition , 1994 .

[6]  Husam N. Alshareef,et al.  Sputter deposition of SrTiO3 thin films for voltage tunable capacitors , 1997 .

[7]  F. Lange,et al.  Epitaxial Growth and Structure of Cubic and Pseudocubic Perovskite Films on Perovskite Substrates , 1997 .

[8]  D. Dimos,et al.  Superconducting transport properties of grain boundaries in YBa2Cu3O7 bicrystals. , 1990, Physical review. B, Condensed matter.

[9]  J. Speck,et al.  Effect of lattice mismatch on the epitaxy of sol-gel LiNbO_3 thin films , 1997 .

[10]  R. Waser,et al.  The effect of Zr on the microstructure of Ba(Ti1−yZry)O3 thin films prepared by chemical-solution deposition , 1998 .

[11]  R. Waser.  Microstructure of ceramic thin films , 1996 .

[12]  F. F. Lange,et al.  Chemical Solution Routes to Single-Crystal Thin Films , 1996, Science.

[13]  M. Mecartney,et al.  Influence of Strontium Concentration on the Microstructure and Electrical Properties of Sol-Gel Derived Barium Strontium Titanate Thin Films , 1996 .

[14]  Hiroshi Maiwa,et al.  Preparation and Properties of Ferroelectric BaTiO3 Thin Films by Sol-Gel Process , 1993 .

[15]  S. Komatsu,et al.  Epitaxial Growth and Dielectric Properties of (Ba0.24Sr0.76)TiO3 Thin Film , 1994 .

[16]  F. Lange,et al.  Lattice mismatch accommodation in perovskite films on perovskite substrates 1 1 Paper presented at S , 1998 .

[17]  Seshu B. Desu,et al.  Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process , 1993 .

[18]  Rex Watton,et al.  Ferroelectric materials and IR bolometer arrays: From hybrid arrays towards integration , 1994 .

[19]  R. W. Schwartz,et al.  Comments on the effects of solution precursor characteristics and thermal processing conditions on the crystallization behavior of sol-gel derived lead zirconate titanate thin films , 1997 .

[20]  Zhengkui Xu,et al.  The role of interfaces on an apparent grain size effect on the dielectric properties for ferroelectric barium titanate ceramics , 1998 .

[21]  D. Payne,et al.  Control of Heteroepitaxy in Sol-Gel Derived LiNbO 3 Thin Layers , 1994 .

[22]  Tatsuo Otsuki,et al.  Quantum jumps in FeRAM technology and performance , 1997 .

[23]  R. Waser,et al.  Influence of Precursor Chemistry on the Formation of MTiO3 (M = Ba, Sr) Ceramic Thin Films , 1998 .

[24]  C. M. Foster,et al.  Characteristics of PZT thin films as ultra-high density recording media , 1997 .

[25]  Neal D. Evans,et al.  In–Situ Transmission Electron Microscopy Crystallization Studies of Sol–Gel‐Derived Barium Titanate Thin Films , 1997 .

[26]  M. Kuwabara,et al.  Preparation of BaTiO 3 and PbTiO 3 thin Films on BaPb 3 Substrates by the SOL-GEL Method and Their Properties , 1992 .

[27]  M. Paranthaman,et al.  Epitaxial growth of BaZrO3 films on single crystal oxide substrates using sol-gel alkoxide precursors , 1997 .

[28]  K. Miller,et al.  Highly oriented thin films of cubic zirconia on sapphire through grain growth seeding , 1991 .

[29]  Roger A. Lessard,et al.  STRUCTURAL AND OPTICAL CHARACTERIZATION OF BATIO3 THIN FILMS PREPARED BY METAL-ORGANIC DEPOSITION FROM BARIUM 2-ETHYLHEXANOATE AND TITANIUM DIMETHOXY DINEODECANOATE , 1994 .

[30]  R. W. Schwartz,et al.  Investigation of PZT//LSCO/IPT//Aerogel Thin Film Composites for Uncooled Pyroelectric Ir Detectors , 1998 .

[31]  W. Spurgeon,et al.  Synthesis and Microstructure of Highly Oriented Lead Titanate Thin Films Prepared by a Sol‐Gel Method , 1989 .

[32]  K. Kikuta,et al.  Processing and ultraviolet patterning of LiNbO3 epitaxial films from metallorganic precursors , 1996 .

[33]  A. Grill,et al.  Effect of TiOx nucleation layer on crystallization of Bi4Ti3O12 films , 1997 .

[34]  Susanne Hoffmann,et al.  Chemical Solution Deposited BaTi03 AND SrTi03 Thin Films With Columnar Microstructure , 1997 .

[35]  J. Horwitz,et al.  Characterization of Sr x Ba 1−x TiO 3 Pulsed Laser Deposition Thin Films , 1996 .

[36]  H. M. Jang,et al.  Phase-formation kinetics of xerogel and electrical properties of sol-gel-derived Ba_xSr_1–xTiO_3 thin films , 1997 .

[37]  L. E. Cross,et al.  Origin of Orientation in Sol‐Gel‐Derived Lead Titanate Films , 1993 .

[38]  J. Speck,et al.  Microstructural development of BaTiO_3 powders synthesized by aqueous methods , 1996 .

[39]  J. Speck,et al.  Epitaxial growth of PbTiO_3 thin films on (001) SrTiO_3 from solution precursors , 1995 .

[40]  Takashi Hayashi,et al.  Film Thickness Dependence of Dielectric Properties of BaTiO3 Thin Films Prepared by Sol-Gel Method , 1994 .

[41]  Lisa C. Klein,et al.  Preparation and Characterization of BaxSr1‐x, TiO3 Thin Films by a Sol‐Gel Technique , 1996 .

[42]  Robert W. Schwartz,et al.  Chemical Solution Deposition of Perovskite Thin Films , 1997 .