The genetic algorithm: refinement of X-ray reflectivity data from multilayers and thin films

Abstract A genetic algorithm (GA) technique has been implemented for determination of structural parameters of thin solid film and superlattice from the X-ray reflectivity and diffuse scattering data. The fundamental concepts underlying genetic algorithms are described along with examples of classical nanostructures illustrating successful application of GA. The method is demonstrated to be robust and flexible in comparison with conventional optimization techniques.