论文信息 - Suppression Mechanism of Volume Shrinkage for SOG Film by Plasma Treatment - 字舞流文

Suppression Mechanism of Volume Shrinkage for SOG Film by Plasma Treatment

A. Ogura | J. Son | T. Koganezawa | H. Akamatsu | K. Nagata | D. Kosemura | I. Hirosawa | M. Hattori | Tatsuo Nishita | T. Shiozawa | D. Katayama | M. Takei | Y. Hirota | M. Machida | Yoshihiro Sato