The effect of a high-reflection electrode on the opposite side of a moth-eye structure on the performance of a nitride-based blue LED is described. Because of the interference effect enhanced by multiple reflections with a high-reflectance Ag-Pd-Cu alloy (APC) p-contact, light extraction is markedly improved. For the 600-nm-pitch sample, both APC and conventional Ni/Au contacts were used. Although the light output powers of LEDs with APC and Ni/Au p-contacts without moth-eye structure are almost the same, those with a moth-eye structure are markedly increased and differ from each other. For the APC contact, the light output is improved by a factor of 3.4, whereas that with a Ni/Au contact is increased by a factor of 2.2. In addition, we fabricated moth-eye LEDs with pitches of 300 nm, 400 nm, 500 nm and 600 nm by low-energy electron-beam projection lithography. We found that the sample with a pitch of 500 nm has the highest output power, which is 3.7 times higher than that of the reference sample. (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)