Helical Nanoholes Bored in Silicon by Wet Chemical Etching Using Platinum Nanoparticles as Catalyst
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[1] Xiuling Li,et al. Metal-assisted chemical etching in HF/H2O2 produces porous silicon , 2000 .
[2] Yin Wu,et al. Uniform, axial-orientation alignment of one-dimensional single-crystal silicon nanostructure arrays. , 2005, Angewandte Chemie.
[3] P. Gorostiza,et al. First stages of platinum electroless deposition on silicon (100) from hydrogen fluoride solutions studied by AFM , 1996 .
[4] X. B. Zhang,et al. A Formation Mechanism for Catalytically Grown Helix-Shaped Graphite Nanotubes , 1994, Science.
[5] S. Motojima,et al. Preparation, Morphology, and Growth Mechanism of Carbon Nanocoils , 2002 .
[6] H. Reisinger,et al. A novel capacitor technology based on porous silicon , 1996 .
[7] N. Mitsugi,et al. Pit Formation Induced by Copper Contamination on Silicon Surface Immersed in Dilute Hydrofluoric Acid Solution , 2004 .
[8] T. Osaka,et al. Survey of the metal nucleation processes on silicon surfaces in fluoride solutions: from dilute HF to concentrated NH4F solutions , 2003 .
[9] Hai‐feng Zhang,et al. Synthesis, Characterization, and Manipulation of Helical SiO2 Nanosprings , 2003 .
[10] H. Presting,et al. Random and Ordered Macropore Formation in p-Type Silicon , 2002 .
[11] Wiring of Bumpless, Three-dimensional Integrated Si Wafers Block Using Through-hole Interconnections : Semiconductors , 2001 .
[12] M. G. Norton,et al. Silicon Carbide Nanosprings , 2003 .
[13] Patrick J. French,et al. Galvanic Cell Formation in Silicon/Metal Contacts: The Effect on Silicon Surface Morphology , 2000 .
[14] Jack W. Judy,et al. Microelectromechanical systems (MEMS): fabrication, design and applications , 2001 .
[15] T. Ohmi,et al. Behavior of Ultrafine Metallic Particles on Silicon Wafer Surface , 1995 .
[16] Shinji Yae,et al. Formation of porous silicon by metal particle enhanced chemical etching in HF solution and its application for efficient solar cells , 2003 .
[17] V. Lehmann. The Physics of Macropore Formation in Low Doped n‐Type Silicon , 1993 .
[18] K. Tsujino,et al. Boring Deep Cylindrical Nanoholes in Silicon Using Silver Nanoparticles as a Catalyst , 2005 .
[19] U. Gösele,et al. Light-emitting porous silicon☆ , 1995 .
[20] W. Lang,et al. Silicon microstructuring technology , 1996 .
[21] Giuseppe Barillaro,et al. Dimensional Constraints on High Aspect Ratio Silicon Microstructures Fabricated by HF Photoelectrochemical Etching , 2002 .
[22] Dorota Temple,et al. Advanced processing techniques for through-wafer interconnects , 2004 .