Effects of Silicon Content on the Microstructures and Mechanical Properties of (AlCrTiZrV)-Six-N High-Entropy Alloy Films

A series of (AlCrTiZrV)-Six-N films with different silicon contents were deposited on monocrystalline silicon substrates by direct-current (DC) magnetron sputtering. The films were characterized by the X-ray diffractometry (XRD), scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), and nano-indentation techniques. The effects of the silicon content on the microstructures and mechanical properties of the films were investigated. The experimental results show that the (AlCrTiZrV)N films grow in columnar grains and present a (200) preferential growth orientation. The addition of the silicon element leads to the disappearance of the (200) peak, and the grain refinement of the (AlCrTiZrV)-Six-N films. Meanwhile, the reticular amorphous phase is formed, thus developing the nanocomposite structure with the nanocrystalline structures encapsulated by the amorphous phase. With the increase of the silicon content, the mechanical properties first increase and then decrease. The maximal hardness and modulus of the film reach 34.3 GPa and 301.5 GPa, respectively, with the silicon content (x) of 8% (volume percent). The strengthening effect of the (AlCrTiZrV)-Six-N film can be mainly attributed to the formation of the nanocomposite structure.

[1]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[2]  Hongrui Peng,et al.  Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition , 1992 .

[3]  M. Hon,et al.  Micro structure and properties of TiSiN films prepared by plasma-enhanced chemical vapor deposition , 1996 .

[4]  T. Bolom,et al.  Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2 nanocomposites with HV= 80 to ≥ 105 GPa , 2000 .

[5]  C. Mitterer,et al.  Microstructure and mechanical/thermal properties of Cr–N coatings deposited by reactive unbalanced magnetron sputtering , 2001 .

[6]  J. Patscheider,et al.  Structure-performance relations in nanocomposite coatings , 2001 .

[7]  Soon Young Yoon,et al.  Superhard Ti–Si–N coatings by a hybrid system of arc ion plating and sputtering techniques ☆ , 2002 .

[8]  B. Cantor,et al.  Microstructural development in equiatomic multicomponent alloys , 2004 .

[9]  J. Procházka,et al.  Conditions required for achieving superhardness of ≥45 GPa in nc-TiN/a-Si3N4 nanocomposites , 2004 .

[10]  T. Shun,et al.  Nanostructured High‐Entropy Alloys with Multiple Principal Elements: Novel Alloy Design Concepts and Outcomes , 2004 .

[11]  J. Pierson,et al.  Structural changes in Zr–Si–N films vs. their silicon content , 2004 .

[12]  S. Vepřek,et al.  Industrial applications of superhard nanocomposite coatings , 2008 .

[13]  J. Yeh,et al.  Effects of substrate temperature and post-annealing on microstructure and properties of (AlCrNbSiTiV)N coatings , 2009 .

[14]  J. Yeh,et al.  Effects of nitrogen content on structure and mechanical properties of multi-element (AlCrNbSiTiV)N coating , 2009 .

[15]  S. H. Sheng,et al.  Superhard nanocomposites: Origin of hardness enhancement, properties and applications , 2010 .

[16]  B. S. Murty,et al.  Processing and properties of nanocrystalline CuNiCoZnAlTi high entropy alloys by mechanical alloying , 2010 .

[17]  H. Tsai,et al.  Equilibrium phase of high-entropy FeCoNiCrCu0.5 alloy at elevated temperature , 2010 .

[18]  T. Shun,et al.  The effects of secondary elemental Mo or Ti addition in Al0.3CoCrFeNi high-entropy alloy on age hardening at 700 °C , 2010 .

[19]  J. Yeh,et al.  Effect of temperature on mechanical properties of Al0.5CoCrCuFeNi wrought alloy , 2010 .

[20]  J. Yeh,et al.  Microstructure and wear behavior of AlxCo1.5CrFeNi1.5Tiy high-entropy alloys , 2011 .

[21]  J. Yeh,et al.  On the superior hot hardness and softening resistance of AlCoCrxFeMo0.5Ni high-entropy alloys , 2011 .

[22]  J. Yeh,et al.  Effects of silicon content on the structure and mechanical properties of (AlCrTaTiZr)–Six–N coatings by reactive RF magnetron sputtering , 2011 .

[23]  Jien-Wei Yeh,et al.  Fatigue behavior of Al0.5CoCrCuFeNi high entropy alloys , 2012 .

[24]  Liqin Wang,et al.  Characteristics of multi-element (ZrTaNbTiW)N films prepared by magnetron sputtering and plasma based ion implantation , 2013 .

[25]  T. G. Nieh,et al.  Grain growth and the Hall–Petch relationship in a high-entropy FeCrNiCoMn alloy , 2013 .

[26]  Shou-Yi Chang,et al.  Effects of silicon content on the structure and properties of (AlCrMoTaTi)N coatings by reactive magnetron sputtering , 2014 .

[27]  K. Dahmen,et al.  Microstructures and properties of high-entropy alloys , 2014 .

[28]  Chia-Jung Chang,et al.  Nanomechanical Properties and Deformation Behaviors of Multi-Component (AlCrTaTiZr)NxSiy High-Entropy Coatings , 2013, Entropy.

[29]  John J. Lewandowski,et al.  Fracture Toughness and Fatigue Crack Growth Behavior of As-Cast High-Entropy Alloys , 2015, JOM.

[30]  Douglas L. Irving,et al.  A Novel Low-Density, High-Hardness, High-entropy Alloy with Close-packed Single-phase Nanocrystalline Structures , 2015 .

[31]  M. Deng,et al.  Oxidation resistance and characterization of (AlCrMoTaTi)-Six-N coating deposited via magnetron sputtering , 2015 .

[32]  C. D. Lundin,et al.  Fatigue behavior of a wrought Al 0.5 CoCrCuFeNi two-phase high-entropy alloy , 2015 .

[33]  Yong Zhang,et al.  A hexagonal close-packed high-entropy alloy: The effect of entropy , 2016 .

[34]  Nikita Stepanov,et al.  Structure and mechanical properties of B2 ordered refractory AlNbTiVZrx (x = 0–1.5) high-entropy alloys , 2017 .

[35]  M. Gibson,et al.  A lightweight single-phase AlTiVCr compositionally complex alloy , 2017 .

[36]  Robert O. Ritchie,et al.  Effect of temperature on the fatigue-crack growth behavior of the high-entropy alloy CrMnFeCoNi , 2017 .

[37]  Karin A. Dahmen,et al.  Corrosion of Al xCoCrFeNi high-entropy alloys: Al-content and potential scan-rate dependent pitting behavior , 2017 .

[38]  P. Liaw,et al.  Corrosion-resistant high-entropy alloys: A review , 2017 .

[39]  P. Liaw,et al.  In-situ electrochemical-AFM study of localized corrosion of Al x CoCrFeNi high-entropy alloys in chloride solution , 2018 .

[40]  Michael C. Gao,et al.  Wear behavior of Al_0.6CoCrFeNi high-entropy alloys: Effect of environments , 2018, Journal of Materials Research.

[41]  Bin Yang,et al.  Homogenization of AlxCoCrFeNi high-entropy alloys with improved corrosion resistance , 2018 .

[42]  John J. Lewandowski,et al.  Fatigue behavior of high-entropy alloys: A review , 2018 .

[43]  Wei Li,et al.  Microstructures and properties of high-entropy alloy films and coatings: a review , 2018 .