Numerical analysis and experimental investigation of discharge characteristics in a ring dielectric line surface‐wave processing plasma apparatus
暂无分享,去创建一个
[1] Bruce Archambeault,et al. The Finite-Difference Time-Domain Method , 1998 .
[2] Jeffrey L. Young,et al. A full finite difference time domain implementation for radio wave propagation in a plasma , 1994 .
[3] E. Kaneko,et al. Characteristics of a Large-Diameter Surface-Wave Mode Microwave-Induced Plasma , 1998 .
[4] Michel Moisan,et al. A Small Microwave Plasma Source for Long Column Production without Magnetic Field , 1975, IEEE Transactions on Plasma Science.
[5] S. Kobayashi,et al. Gegeneration of a Microwave Plasma Using Traveling Waves , 1989 .
[6] R. Luebbers,et al. The Finite Difference Time Domain Method for Electromagnetics , 1993 .
[7] Y. Yoshida,et al. Generation of a Surface-Wave-Enhanced Plasma Using Coaxial-Type Open-Ended Dielectric Cavity , 1995 .
[8] K. Yee. Numerical solution of initial boundary value problems involving maxwell's equations in isotropic media , 1966 .
[9] M. Nagatsu,et al. Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma , 1997 .
[10] M. Moisan,et al. A new HF device for the production of long plasma columns at a high electron density , 1974 .
[11] M. Moisan. Description and properties of an r.f. plasma used for the study of parametric interaction of a strong E-M field with plasma , 1974 .
[12] Y. Ida,et al. ELECTRON DENSITY MEASUREMENT OF A PLASMA COLUMN BY SURFACE WAVE RESONANCES , 1964 .
[13] D. Korzec,et al. Scaling of microwave slot antenna (SLAN): a concept for efficient plasma generation , 1996 .
[14] Qing Chen,et al. Numerical analysis of surface wave excitation in a planar-type nonmagnetized plasma processing device , 1999 .
[15] Michel Moisan,et al. Plasma sources based on the propagation of electromagnetic surface waves , 1991 .
[16] A. Trivelpiece,et al. Experimental investigations of the propagation of surface waves along a plasma column , 1982 .
[17] T. Grotjohn,et al. Modeling the electromagnetic excitation of a microwave cavity plasma reactor , 1994 .
[18] M. Nagatsu,et al. Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma , 1996 .
[19] M. Moisan,et al. Attenuation of a surface wave in an unmagnetized RF plasma column , 1977 .
[20] S. Fujimura,et al. Resist stripping in an O2+H2O plasma downstream , 1991 .
[21] A. W. Trivelpiece,et al. Space Charge Waves in Cylindrical Plasma Columns , 1959 .
[22] R. Pantel,et al. Axial electron density and wave power distributions along a plasma column sustained by the propagation of a surface microwave , 1980 .
[23] R. Pantel,et al. The theory and characteristics of an efficient surface wave launcher (surfatron) producing long plasma columns , 1979 .