Integration of enzyme-immobilized column with electrochemical flow cell using micromachining techniques for a glucose detection system

A miniaturized enzyme column integrated with a microelectrochemical flow cell was developed for the flow injection detection of glucose. The device consisted of a glucose oxidase-immobilized column and a flow cell with a microelectrode, which were fabricated and integrated on a silicon wafer by micromachining techniques such as photolithography, anisotropic etching, thermal oxidation, vacuum evaporation, and anodic bonding. A silicon wafer was photolithographically developed and anisotropically etched to form a V-shaped groove 1 m long, 100 μm wide, and 70 μm deep. A glass plate with thin-film electrodes was anodically bonded to the silicon before enzyme immobilization