论文信息 - Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact - 字舞流文

Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact

M. H. van der Veen | G. Groeseneken | C. Huyghebaert | Z. Tokei | P. Vereecken | D. Cott | B. Vereecke | N. Chiodarelli