论文信息 - Testing, Repairing and Packaging Technology for the CMOS-MEMS Integrated Tactile Sensor - 字舞流文

Testing, Repairing and Packaging Technology for the CMOS-MEMS Integrated Tactile Sensor

Yutaka Nonomura | Masanori Muroyama | Shuji Tanaka | Masayoshi Esashi | Mitsutoshi Makihata | Yoshihiro Nakano | Takahiro Nakayama | Ui Yamaguchi | Hitoshi Yamada | Hirofumi Funabashi | Yoshiyuki Hata | M. Esashi | Y. Nonomura | Shuji Tanaka | H. Funabashi | Y. Hata | M. Muroyama | T. Nakayama | M. Makihata | Y. Nakano | U. Yamaguchi | Hitoshi Yamada

[1] Zhiwei Luo,et al. Development of the Tactile Sensor System of a Human-Interactive Robot “RI-MAN” , 2008, IEEE Transactions on Robotics.

[2] Aude Billard,et al. A survey of Tactile Human-Robot Interactions , 2010, Robotics Auton. Syst..

[3] Dzung Viet Dao,et al. Tactile Perception using Micro Force/Moment Sensor Embedded in Soft Fingertip , 2006, 2006 5th IEEE Conference on Sensors.

[4] Hiroyuki Shinoda,et al. Tactile Sensing for Dexterous Hand , 2000 .

[5] Yasuo Kuniyoshi,et al. Conformable and scalable tactile sensor skin for curved surfaces , 2006, Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006..

[6] M. Muroyama,et al. Integration and packaging technology of MEMS-on-CMOS tactile sensor for robot application using molded thick BCB layer and backside-grooved electrical connection , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[7] Makoto Shimojo,et al. Development of a mixed signal LSI for tactile data processing , 2004, 2004 IEEE International Conference on Systems, Man and Cybernetics (IEEE Cat. No.04CH37583).

[8] Yutaka Nonomura,et al. Development of an LSI for Tactile Sensor Systems on the Whole-Body of Robots , 2011 .