Machining of micro aspherical mould inserts

Abstract This paper reports a parametric investigation and development of grinding technologies for micro aspherical mould inserts using parallel grinding method. The parametric investigation revealed that at nanometric scale the undeformed chip thickness has little influence on the surface finish of ground inserts. The grinding trace spacing has a slightly larger influence on the surface finish. A new technique was developed to true and dress the resin bonded micro wheels with mesh size of #3000, which produced a satisfactory wheel form accuracy and relatively high grain packing density. A form error compensation technique was also developed, with which mould inserts of submicron form accuracy were consistently produced. Using the developed technologies, micro aspherical inserts of diameters ranging from 200 μm to 1000 μm with surface finish of around 10 nm and form error of ∼0.2–0.4 μm were successfully fabricated.

[1]  Han Huang,et al.  Micro/meso ultra precision grinding of fibre optic connectors , 2004 .

[2]  Katsuo Syoji Some Problems of the Grinding in the 21st Century , 2001 .

[3]  Tsunemoto Kuriyagawa,et al.  Machining of Aspherical Molding Dies Utilizing Parallel Grinding Method. , 2002 .

[4]  Tsunemoto Kuriyagawa,et al.  A Novel Form Error Compensation Technique for Tungsten Carbide Mould Insert Machining Utilizing Parallel Grinding Technology , 2004 .

[5]  Stephen Malkin,et al.  Grinding Technology: Theory and Applications of Machining with Abrasives , 1989 .

[6]  Craig R. Friedrich,et al.  Micromilling development and applications for microfabrication , 1997 .

[7]  Michael Krystek,et al.  A fast gauss filtering algorithm for roughness measurements , 1996 .

[8]  Tsunemoto Kuriyagawa,et al.  Study on Precision Grinding of Micro Aspherical Surface. Feasibility Study of Micro Aspherical Surface by Inclined Rotational Grinding. , 1998 .

[9]  T. Masuzawa,et al.  Microultrasonic Machining by the Application of Workpiece Vibration , 1999 .

[10]  Manfred Geiger,et al.  Microstructuring and surface modification by excimer laser machining under thin liquid films , 1998, Other Conferences.

[11]  Tsunemoto Kuriyagawa,et al.  Nano-Topography Characterization of Axisymmetrical Aspherical Ground Surfaces , 2003 .

[12]  Kui Liu,et al.  Ductile cutting of tungsten carbide , 2001 .

[13]  Kamlakar P Rajurkar,et al.  3D Micro-EDM Using CAD/CAM , 2000 .

[14]  Tsunemoto Kuriyagawa,et al.  A new grinding method for aspheric ceramic mirrors , 1996 .

[15]  Takahisa Masuzawa,et al.  State of the Art of Micromachining , 2000 .

[16]  Jiwang Yan,et al.  Study on Ultra-Precision Grinding of Micro Aspherical Surface (3rd Report) : Micronizing of Aspherical Surface in Inclined Rotational Grinding , 1998 .

[17]  T. Masuzawa,et al.  Micro-EDM for Three-Dimensional Cavities - Development of Uniform Wear Method - , 1998 .

[18]  Hans Kurt Tönshoff,et al.  Three-Dimensional Micromachining by Machine Tools , 1997 .

[19]  H. Weule,et al.  Micro-Cutting of Steel to Meet New Requirements in Miniaturization , 2001 .