论文信息 - Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.

[1] K. Cooper,et al. Miniature all-silica fiber optic pressure and acoustic sensors. , 2005, Optics letters.

[2] Edip Niver,et al. World’s First Pure Fabry-Perot Diaphragm Fiber Optic Sensor (DFOS) , 2006 .

[3] Yan Sun,et al. Fabry-Perot diaphragm fiber-optic sensor. , 2007, Applied optics.

[4] Anbo Wang,et al. Fiber Fabry-Perot sensors for detection of partial discharges in power transformers. , 2003, Applied optics.

[5] K. R. Farmer,et al. An ultra-sensitive optical MEMS sensor for partial discharge detection , 2005 .

[6] Balakumar Balachandran,et al. Sensor diaphragm under initial tension: Linear analysis , 2005 .

[7] S. Timoshenko,et al. THEORY OF PLATES AND SHELLS , 1959 .

[8] Anbo Wang,et al. Miniature fiber-optic pressure sensor , 2005 .