Overview of Hybrid Micro-manufacturing Processes

Micromachining processes have been cynosure for the manufacturing industries owing to its potential to manufacture micro-components such as microsensors, micro-displays, micro-batteries, etc. The different micromachining techniques have established themselves in different areas of daily life such as automotive, photonics, medical instruments, renewable energy, and aerospace. The micro-components are made from multiple materials and are of complex shapes that demand accuracy at submicron levels. To meet the accuracy expectations, a number of micromachining processes and their integration are required. The present chapter conceptualizes the hybrid micromachining processes providing a brief introduction, classification, and few recent applications of the processes. The importance of hybrid machining techniques is reflected in the future scope provided towards the end of the chapter. The chapter finally ends with the concluding remarks.

[1]  Changshui Gao,et al.  A study of ultrasonically aided micro-electrical-discharge machining by the application of workpiece vibration , 2003 .

[2]  Jae Hoon Lee,et al.  Laser Assisted Machining Process of HIPed Silicon Nitride , 2009 .

[3]  Zheng Zhi-Ping,et al.  Feasibility of 3D Surface Machining on Pyrex Glass by Electrochemical Discharge Machining (ECDM) , 2007 .

[4]  P. Rai-Choudhury.  Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography , 1997 .

[5]  F. Pušavec,et al.  Analysis of Residual Stresses in Sustainable Cryogenic Machining of Nickel Based Alloy—Inconel 718 , 2011 .

[6]  Thomas A. Dow,et al.  Review of vibration-assisted machining , 2008 .

[7]  Ruxu Du,et al.  An investigation of ultrasonic-assisted electrical discharge machining in gas , 2006 .

[8]  D. Guo,et al.  Physics-Based Predictive Cutting Force Model in Ultrasonic-Vibration-Assisted Grinding for Titanium Drilling , 2009 .

[9]  Ahmed B. Khairy,et al.  Aspects of surface and edge finish by magnetoabrasive particles , 2001 .

[10]  Yan-Cherng Lin,et al.  Machining characteristics of magnetic force-assisted EDM , 2008 .

[11]  David K. Aspinwall,et al.  A study on ultrasonic assisted creep feed grinding of nickel based superalloys , 2012 .

[12]  Massimiliano Barletta,et al.  Fluidized bed assisted abrasive jet machining (FB-AJM): Precision internal finishing of Inconel 718 components , 2007 .

[13]  J. Kozak,et al.  Abrasive Electrodischarge Grinding (AEDG) of advanced materials , 2002 .

[14]  A. K. M. Nurul Amin,et al.  Effects of workpiece preheating on surface roughness, chatter and tool performance during end milling of hardened steel D2 , 2008 .

[15]  Matthias Kock,et al.  Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision , 2003 .

[16]  Mahmudur Rahman,et al.  Simultaneous micro-EDM and micro-ECM in low-resistivity deionized water , 2012 .

[17]  Kuen Ming Shu,et al.  A study of electrical discharge grinding using a rotary disk electrode , 2008 .

[18]  Mahmudur Rahman,et al.  Transitions of micro-EDM/SEDCM/micro-ECM milling in low-resistivity deionized water , 2013 .

[19]  Petar Piljek,et al.  Micromachining - review of literature from 1980 to 2010 , 2014 .

[20]  Kai Cheng,et al.  Design of ultraprecision machine tools with applications to manufacture of miniature and micro components , 2005 .

[21]  David K. Aspinwall,et al.  Hybrid High Speed Machining (HSM): System Design and Experimental Results for Grinding/HSM and EDM/HSM , 2001 .

[22]  Mohammadreza Shabgard,et al.  The Effect of Ultrasonic Vibration of Workpiece in Electrical Discharge Machining of AISIH13 Tool Steel , 2009 .

[23]  David K. Aspinwall,et al.  Electrochemical superabrasive machining of a nickel-based aeroengine alloy using mounted grinding points , 2009 .

[24]  Muhammad P. Jahan,et al.  On-machine fabrication of high-aspect-ratio micro-electrodes and application in vibration-assisted micro-electrodischarge drilling of tungsten carbide , 2010 .

[25]  Sehijpal Singh,et al.  Development of magneto abrasive flow machining process , 2002 .

[26]  Javad Akbari,et al.  Study on Ultrasonic Vibration Effects on Grinding Process of Alumina Ceramic (Al2O3) , 2008 .

[27]  Deepak Rajendra Unune,et al.  Current status and applications of hybrid micro-machining processes: A review , 2015 .

[28]  Chih-Wei Hung,et al.  Development of multi-axis numerical control program for mill—turn machine , 2008 .

[29]  Kuan-Ming Li,et al.  Experimental Study on Vibration-Assisted Grinding , 2012 .

[30]  Shreyes N. Melkote,et al.  Process capability study of laser assisted micro milling of a hard-to-machine material , 2012 .

[31]  Kamlakar P Rajurkar,et al.  New Developments in Electro-Chemical Machining , 1999 .

[32]  Takayuki Tsujimoto,et al.  Study of vibration-assisted micro-EDM-The effect of vibration on machining time and stability of discharge , 2008 .

[33]  Jun-Young Choi,et al.  A review on research and development of laser assisted turning , 2011 .

[34]  C. Chu,et al.  Hybrid micromachining of glass using ECDM and micro grinding , 2013 .

[35]  Massimiliano Barletta,et al.  Development of an abrasive jet machining system assisted by two fluidized beds for internal polishing of circular tubes , 2006 .

[36]  L. Dąbrowski,et al.  Investigation into hybrid abrasive and electrodischarge machining , 2005 .

[37]  M. Pradeep Kumar,et al.  The Influence of Cryogenic Coolants in Machining of Ti–6Al–4V , 2013 .

[38]  Aydin Nassehi,et al.  A review of hybrid manufacturing processes – state of the art and future perspectives , 2013, Int. J. Comput. Integr. Manuf..

[39]  Yung C. Shin,et al.  Plasma enhanced machining of Inconel 718: modeling of workpiece temperature with plasma heating and experimental results , 2001 .

[40]  Kamlakar P Rajurkar,et al.  Micro and Nano Machining by Electro-Physical and Chemical Processes , 2006 .

[41]  J. P. Davim,et al.  A BRIEF REVIEW ON MICROMACHINING OF MATERIALS , 2012 .

[42]  Bert Lauwers,et al.  Surface Integrity in Hybrid Machining Processes , 2011 .

[43]  Oğuz Çolak,et al.  Investigation on Machining Performance of Inconel 718 in High Pressure Cooling Conditions , 2012 .

[44]  Oscar Gonzalo,et al.  Mechanisms involved in the improvement of Inconel 718 machinability by laser assisted machining (LAM) , 2013 .

[45]  Shreyes N. Melkote,et al.  Laser assisted micro-milling of hard-to-machine materials , 2009 .

[46]  Peter Krajnik,et al.  Investigation of machining performance in high-pressure jet assisted turning of Inconel 718: An experimental study , 2009 .

[47]  T. M. Yue,et al.  Grinding-aided electrochemical discharge machining of particulate reinforced metal matrix composites , 2013 .

[48]  Mohd Amri Lajis,et al.  Hot Machining of Hardened Steels with Coated Carbide Inserts , 2009 .