Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applications

Abstract Considerable price reduction with respect to currently available sensors can be reached by industrial production of an integrated fully compensated sensor. A compatible process for simultaneous fabrication of sensors and IC was developed, starting from a standard 20 V bipolar process and from an original process for piezoresistive pressure sensors. A first approach of total integration of sensing element, amplifier and temperature compensation circuitry for an 8-bar differential pressure sensor in an automotive package was realised on a hybrid. The test included both electrical and environmental measurements. The results obtained with these devices show the feasability of integrating on the same chip the sensor and the output signal conditioning.