论文信息 - Nanometric Displacement Measurement System Using Three-Longitudinal-Mode He-Ne Laser

Nanometric Displacement Measurement System Using Three-Longitudinal-Mode He-Ne Laser

In this paper, design and simulation of a nanometric displacement measurement system is discussed. The combination of the Doppler effect and interferometry method is being used. A stabilized three-longitudinalmode He-Ne laser with o A 6328 wavelength and cm 35 cavity length is used. Its primary and secondary beat frequencies are 428.60MHz, 429.27MHz, and 670kHz, respectively. Therefore, the maximum measurable velocity is equal to s mm / 106 .Also, the measuring displacement is limited to the fraction of the synthetic wavelength and its accuracy will be decreased to 0.09nm.

Saeed Olyaee | Shahram Mohammad Nejad

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