The continuous spinning current (CSC) stress sensor method for the extraction of two stress components in an offset compensated manner

[1]  Charles S. Smith.  Piezoresistance Effect in Germanium and Silicon , 1954 .

[2]  W. P. Mason,et al.  Use of Piezoresistive Materials in the Measurement of Displacement, Force, and Torque , 1957 .

[3]  R. N. Thurston,et al.  Erratum: Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance Effects , 1961 .

[4]  O. N. Tufte,et al.  Piezoresistive Properties of Heavily Dopedn-Type Silicon , 1964 .

[5]  Y. Kanda,et al.  A graphical representation of the piezoresistance coefficients in silicon , 1982, IEEE Transactions on Electron Devices.

[6]  Yozo Kanda,et al.  Nonlinearity of piezoresistance effect in p- and n-Type silicon , 1990 .

[7]  Richard H. Sherman,et al.  Chaotic communications in the presence of noise , 1993, Optics & Photonics.

[8]  Robert G. Meyer,et al.  Analysis and Design of Analog Integrated Circuits , 1993 .

[9]  Gabor C. Temes,et al.  Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization , 1996, Proc. IEEE.

[10]  G. Kovacs.  Micromachined Transducers Sourcebook , 1998 .

[11]  Henry Baltes,et al.  Offset reduction in Hall devices by continuous spinning current method , 1998 .

[12]  Sandra Bellekom,et al.  Influence of mechanical stress on the offset voltage of Hall devices operated with spinning current method , 1999 .

[13]  R.C. Jaeger,et al.  Silicon piezoresistive stress sensors and their application in electronic packaging , 2001, IEEE Sensors Journal.

[14]  O. Paul,et al.  Two-dimensional high density piezo-FET stress sensor arrays for in-situ monitoring of wire bonding processes , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[15]  O. Paul,et al.  Geometry dependent sensitivity of planar piezoresistive stress sensors based on the pseudo-Hall effect , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

[16]  Patrick Ruther,et al.  Multidimensional CMOS in-plane stress sensor , 2005 .