Laser damage of silica and hafnia thin films made with different deposition technologies

A comparative study is made on the laser damage resistance of monolayers coatings made with different technologies. HfO2 and SiO2 thin films have been deposited on fused silica substrates with Dual Ion Beam Sputtering, Electron Beam Deposition (with and without Ion Assistance) and Reactive Low Voltage Ion Plating technologies. The laser damage thresholds of these coatings have been determined at 1064nm and 355nm using a nanosecond pulsed YAG laser, and a 1-on-1 test procedure.

[1]  L. Poupinet,et al.  Evaporation and ion assisted deposition of HfO2 coatings: Some key points for high power laser applications , 2000 .

[2]  Christopher J. Stolz,et al.  Advantages of evaporation of hafnium in a reactive environment formanufacture of high-damage-threshold multilayer coatings by electron-beam deposition , 1999, Optical Systems Design.

[3]  D Milam,et al.  Influence of deposition parameters on laser-damage threshold of silica-tantala AR coatings. , 1982, Applied optics.

[4]  Norbert Kaiser,et al.  A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition , 2002 .

[5]  F. Flory,et al.  Thin Films for Optical Systems , 1995 .

[6]  Laurent Gallais,et al.  Influence of polishing and cleaning on the laser-induced damage threshold of substrates and coatings at 1064 nm , 2007 .

[7]  C J Stolz,et al.  Reactive evaporation of low-defect density hafnia. , 1993, Applied optics.

[8]  Norbert Kaiser,et al.  Comparative study of the UV-optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition, and plasma-ion-assisted deposition , 2000, SPIE Optics + Photonics.

[9]  Michel Lequime,et al.  Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering. , 2008, Applied optics.

[10]  Michel Lequime,et al.  Laser damage resistance of silica thin films deposited by Electron Beam Deposition, Ion Assisted Deposition, Reactive Low Voltage Ion Plating and Dual Ion Beam Sputtering , 2007 .