Electrostatic Latch Mechanism for Handling Projection on Arrayed Vertical Motion System

We have previously proposed an arrayed vertical motion system based on a tulip-shaped electrostatic clutch for producing haptic displays. The system has an advantage in that it is able to individually operate arrayed end-effecter elements with high-power and large strokes (output: 600 mN and displacement: 60 mum). We added a new electrostatic latch mechanism to the system to individually control the projection state. We used MEMS technologies to fabricate a 4times4 array electrostatic latch mechanism. The total size of the mechanism was 6.0 times 6.0 times 0.5 mm. We evaluated the relationship between the applied voltage and a holding force of a few mN was obtained for the spring device.

[1]  Mitsuhiro Shikida,et al.  A force transmission system based on a tulip-shaped electrostatic clutch for haptic display devices , 2006 .

[2]  Shuichi Takayama,et al.  Computerized microfluidic cell culture using elastomeric channels and Braille displays. , 2004, Proceedings of the National Academy of Sciences of the United States of America.

[3]  O. Tabata,et al.  Vertical Drive Micro Actuator Using SMA Thin Film For A Smart Button , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.