Analytical Energy Model for the Dynamic Behavior of RF MEMS Switches Under Increased Actuation Voltage
暂无分享,去创建一个
David Girbau | Lluis Pradell | Flavio Giacomozzi | Antonio Lazaro | Sabrina Colpo | Jasmina Casals-Terre | Marco A. Llamas
[1] Romolo Marcelli,et al. Mechanical modelling of capacitive RF MEMS shunt switches , 2009, 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS.
[2] P. Blondy,et al. A Two-Pole Lumped-Element Programmable Filter With MEMS Pseudodigital Capacitor Banks , 2008, IEEE Transactions on Microwave Theory and Techniques.
[3] F. De Flaviis,et al. Combined Mechanical and Electrical Analysis of a Microelectromechanical Switch for RF Applications , 1999, 1999 29th European Microwave Conference.
[4] Robert Sattler,et al. Modeling of an electrostatic torsional actuator: demonstrated with an RF MEMS switch , 2002 .
[5] V. Leus,et al. A New Efficient Method for Simulating the Dynamic Response of Electrostatic Switches , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
[6] J. Oberhammer,et al. Deep-Reactive-Ion-Etched Wafer-Scale-Transferred All-Silicon Dielectric-Block Millimeter-Wave MEMS Phase Shifters , 2010, Journal of Microelectromechanical Systems.
[7] J. Casals-Terre,et al. Snap-Action Bistable Micromechanisms Actuated by Nonlinear Resonance , 2008, Journal of Microelectromechanical Systems.
[8] J. Iannacci,et al. A flexible technology platform for the fabrication of RF-MEMS devices , 2011, CAS 2011 Proceedings (2011 International Semiconductor Conference).
[9] S. Senturia,et al. Speed-energy optimization of electrostatic actuators based on pull-in , 1999 .
[10] V. Leus,et al. On the Dynamic Response of Electrostatic MEMS Switches , 2008, Journal of Microelectromechanical Systems.
[11] Gabriel M. Rebeiz,et al. Nonlinear electro-mechanical modeling of MEMS switches , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).
[12] A. Faes,et al. A simple analytical method for residual stress measurement on suspended MEM structures using surface profilometry , 2013 .
[13] J.B. Hacker,et al. A monolithic MEMS switched dual-path power amplifier , 2001, IEEE Microwave and Wireless Components Letters.
[14] E. B. Magrab,et al. Vibrations of Elastic Systems: With Applications to MEMS and NEMS , 2012 .
[15] R.R. Mansour,et al. Capacitive RF MEMS Switches Fabricated in Standard 0.35-$\mu{\hbox{m}}$ CMOS Technology , 2010, IEEE Transactions on Microwave Theory and Techniques.
[16] David Girbau,et al. RF-MEMS Uniplanar 180 $^{\circ}$ Phase Switch Based on a Multimodal Air-Bridged CPW Cross , 2011, IEEE Transactions on Microwave Theory and Techniques.
[17] A. Lazaro,et al. Characterization of dynamics and power handling of RF MEMS using vector measurement techniques , 2004, IEEE Transactions on Microwave Theory and Techniques.
[18] J. Casals-Terre,et al. Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators , 2007, Journal of Microelectromechanical Systems.
[19] Meng Nie,et al. An analytical model for pull-in voltage of clamped–clamped multilayer beams , 2004 .
[20] Lei Zhang,et al. Electromechanical model of RF MEMS switches , 2003 .