论文信息 - ANALYTIC CROSS SECTIONS FOR ELECTRON COLLISIONS WITH CO, CO2, AND H2O RELEVANT TO EDGE PLASMA IMPURITIES

ANALYTIC CROSS SECTIONS FOR ELECTRON COLLISIONS WITH CO, CO2, AND H2O RELEVANT TO EDGE PLASMA IMPURITIES

Abstract Cross section data in the energy range above 1 eV have been critically evaluated for electron impact collision processes involving the impurity species (CO, CO 2 , and H 2 O) most relevant to low-temperature plasmas. A short review of the cross section measurements is given for each collision process. The literature has been surveyed up to December 1999. Analytic fits to the recommended cross sections are also presented.

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