Simulation and design optimization of microsystems based on standard simulators and adaptive search techniques

The concept of partial automated design optimization and the improvement of a micropump as a first application is described. Starting with a parametrizable simulation model the parameter values are modified with evolutionary algorithms until the simulation results which describe the behaviour of the system satisfy the defined goals. As the quality of the optimization depends strongly on the quality of the simulation model we give an outlook on a concept for improving the simulation model or components of this model by using FEM-simulation results.