Design aspects of a large scale turbomolecular pump with active magnetic bearings

Abstract A large scale 5-axis magnetically levitated turbomolecular pump is designed and fabricated in this paper. The rotor is supported by two radial active magnetic bearings (AMBs) and an axial AMB, and driven by a high-speed brushless DC Motor with a ring permanent magnet. The considerations discussed are described by design of an actual magnetic levitation turbomolecular pump with rated high-speed vacuum pumping speed of 4100L/s and ultra-high vacuum of the order of 1.8 × 10 −7 Pa. The vacuum, stress, modal, and electromagnetic aspects are put equal weight in the design of a large scale turbomolecular pump supported by AMBs. The thermal assembly technology of the ring PM, sleeve, and shaft for the turbo rotor is proposed. Finally, the suggested design methodology for designing a large scale turbomolecular pump with AMBs is presented.

[1]  G. Schweitzer,et al.  Magnetic bearings : theory, design, and application to rotating machinery , 2009 .

[2]  Harish Hirani,et al.  Design of eight pole radial active magnetic bearing using monotonicity , 2014, 2014 9th International Conference on Industrial and Information Systems (ICIIS).

[3]  Gang Liu,et al.  A Novel Power Failure Compensation Control Method for Active Magnetic Bearings Used in High-Speed Permanent Magnet Motor , 2016, IEEE Transactions on Power Electronics.

[4]  S. Giors,et al.  High-speed drag-cup induction motors for turbo-molecular pumps applications , 2006, INTERMAG 2006 - IEEE International Magnetics Conference.

[5]  Gang Liu,et al.  Suppression of Imbalance Vibration in AMB-Rotor Systems Using Adaptive Frequency Estimator , 2015, IEEE Transactions on Industrial Electronics.

[6]  M. Hablanian.  Engineering aspects of turbomolecular pump design , 2007 .

[7]  L. Piroddi,et al.  Vibration control of a turbomolecular vacuum pump using piezoelectric actuators , 2006, Proceedings of the 45th IEEE Conference on Decision and Control.

[8]  Myounggyu D. Noh,et al.  Design of Fault-Tolerant Inductive Position Sensor , 2007, 2007 IEEE International Conference on Control Applications.

[9]  Lei Guo,et al.  Composite Hierarchical Antidisturbance Control for Magnetic Bearing System Subject to Multiple External Disturbances , 2014, IEEE Transactions on Industrial Electronics.

[10]  Bangcheng Han,et al.  The multiple objective optimization of high-speed rotor supported by magnetic bearing in BLDCM , 2014 .

[11]  M.D. Noh,et al.  Design and implementation of a fault-tolerant magnetic bearing system for turbo-molecular vacuum pump , 2005, IEEE/ASME Transactions on Mechatronics.

[12]  Shinji Wakui,et al.  A phase stabilization method for unbalance vibration control of five-axes active magnetic bearing systems , 2014, 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[13]  Y. Nakamura,et al.  Unbalance vibration control for active magnetic bearing using automatic balancing system and peak-of-gain control , 2013, 2013 IEEE International Conference on Mechatronics (ICM).

[14]  Bangcheng Han,et al.  Vibration Suppression Control for AMB-Supported Motor Driveline System Using Synchronous Rotating Frame Transformation , 2015, IEEE Transactions on Industrial Electronics.

[15]  Yin Zhang,et al.  Optimum Compensator Design for the Flexible Rotor in Magnetically Suspended Motor to Pass the First Bending Critical Speed , 2016, IEEE Transactions on Industrial Electronics.

[16]  Kenzo Nonami,et al.  Sliding mode control with time-varying hyperplane for AMB systems , 1998 .

[17]  Ying-Tsun Lee,et al.  Adaptive variable structure controller design of turbomolecular pump with active magnetic bearings , 2008, 2008 3rd IEEE Conference on Industrial Electronics and Applications.

[18]  Dimitri Batani,et al.  Design modification in rotor blade of turbo molecular pump , 2012 .

[19]  P. Guglielmi,et al.  Analysis and modeling of rotor slot enclosure effects in high speed induction motors , 2011, 2011 IEEE Energy Conversion Congress and Exposition.

[20]  Alberto Leva,et al.  Feedback and feedforward active vibration control schemes for a turbomolecular vacuum pump , 2007, 2007 European Control Conference (ECC).

[21]  Alberto Leva,et al.  Modelling and active vibration control of a turbomolecular vacuum pump , 2006, 2006 IEEE Conference on Computer Aided Control System Design, 2006 IEEE International Conference on Control Applications, 2006 IEEE International Symposium on Intelligent Control.

[22]  Bangcheng Han,et al.  Design, Modeling, Fabrication, Back-to-Back Test of a Magnetic Bearing System for High-Speed BLDCM Application , 2015 .

[23]  R.N. Tuncay,et al.  The Effect of Current Control Strategies on Power Consumption of a Magnetically Levitated Turbomolecular Pump , 2006, 2006 CES/IEEE 5th International Power Electronics and Motion Control Conference.

[24]  Zhuo Wang,et al.  Design, Modeling, Fabrication, and Test of a Large-Scale Single-Gimbal Magnetically Suspended Control Moment Gyro , 2015, IEEE Transactions on Industrial Electronics.

[25]  Hsiao-Wei D. Chiang,et al.  Rotor Dynamics Analysis and Testing of a Turbomolecular Pump Rotor-Bearing System , 2011 .