Study on Performance of Laminated Piezoelectric Pneumatic Servo Valve

Abstract Pneumatic servo valve driven by piezoelectric ceramic is proposed. The dynamic m ode l of the valve w as built using analytical approach and the working principle of the servo valve is analyzed. The simulation analysis w as carried out by MATLAB and AMESIM software respectively. Simulation results show that the valve has higher bandwidth and shorter response time than traditional electromagnetic servo valve. The step response time is 3.3 ms and the bandwidth is 438 Hz. Which is faster than normal electromagnetic valve 6 to10 times; The servo valve has advantages of simple mechanical structure, strong anti-interference and better dynamic characteristics and so on.