论文信息 - A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge - 字舞流文

A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge

P. Fitl | J. Musil | M. Novotný | J. Vlcek | P. Pokorný | J. Bulíř | J. Lančok | M. Mišina | E. Marešová