论文信息 - Surface modification with gas cluster ion beams - 字舞流文

Surface modification with gas cluster ion beams

I. Yamada | M. Sosnowski | W. Brown | J. A. Norhby

[1] E. Becker. Production and applications of cluster beams , 1989 .

[2] R. Klingelhöfer,et al. Micromachining with cluster ions , 1989 .

[3] E. Irene,et al. Ellipsometric and Rutherford backscattering characterization of low‐energy hydrogen‐, helium‐, neon‐, and argon‐bombarded silicon , 1988 .

[4] L. Friedman,et al. Energetic cluster impacts on thin gold and tantalum films , 1986 .

[5] L. Friedman,et al. Larger cluster ion impact phenomena , 1986 .

[6] K. Bier,et al. Strahlen aus kondensierten Atomen und Molekeln im Hochvakuum , 1956 .