A Microactuation and Sensing Platform With Active Lockdown for In Situ Calibration of Scale Factor Drifts in Dual-Axis Gyroscopes

This paper presents the design and experimental results of a microvibratory actuation and sensing platform to provide on-chip physical stimulus for in situ calibration of long-term scale factor drifts in multiaxis microelectromechanical systems (MEMS) inertial sensors. The platform consists of a three degrees-of-freedom micromotion stage that can provide piezoelectric actuation for X/Y-tilting reference stimuli, compensation of undesired off-axis motion, integrated sensing of applied periodic stimulus, and electrostatic position lock-down for shock protection. A dual-axis MEMS gyroscope is mounted on top of the microplatform, and its electrical interconnects are provided through microfabricated highly flexible parylene cables with virtually zero-loading. The piezoelectric stage is measured to provide up to 280°/s angular ac excitation to a 25-mg inertial sensor payload at an expense of <;100 μW, while providing an analog sensing signal (11 mV/°/s) to determine the applied rate with a precision of 1.2 °/s. The estimated scale factor has <; 0.8% deviation from rate-table characterized values on the same-model gyroscope samples. With further improvements in control precision and angular velocity estimation, the introduced platform is expected enable on-chip self-calibration of long-term scale-factor drifts to <; 100 ppm.

[1]  A. N. Shirazi,et al.  Combined phase-readout and self-calibration of MEMS gyroscopes , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[2]  K. Najafi,et al.  A high-Q birdbath resonator gyroscope (BRG) , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[3]  Yilong Hao,et al.  Virtual Rate-Table Method for Characterization of Microgyroscopes , 2012, IEEE Sensors Journal.

[4]  F. Ayazi,et al.  A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability , 2008, Journal of Microelectromechanical Systems.

[5]  Helmut Seidel,et al.  Resonant accelerometer with self-test , 2001 .

[6]  Andrei M. Shkel,et al.  Active structural error suppression in MEMS vibratory rate integrating gyroscopes , 2003 .

[7]  H. V. Allen,et al.  Accelerometer systems with self-testable features , 1989 .

[8]  Weili Cui,et al.  Integrated Optical Displacement Detection and Electrostatic Actuation for Directional Optical Microphones With Micromachined Biomimetic Diaphragms , 2009, IEEE Sensors Journal.

[9]  Farrokh Ayazi,et al.  Micromachined inertial sensors , 1998, Proc. IEEE.

[10]  M. Grewal,et al.  How Good Is Your Gyro [Ask the Experts] , 2010, IEEE Control Systems.

[11]  T. Akin,et al.  A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[12]  C. Clevy,et al.  Modeling, fabrication, and validation of a high-performance 2-DoF piezoactuator for micromanipulation , 2005, IEEE/ASME Transactions on Mechatronics.

[13]  Chang-Jin Kim,et al.  ELECTROSTATICALLY DRIVEN ROTOR ON CONDUCTIVE LIQUID RING BEARINGS , 2012 .

[14]  Zhiyong Chen,et al.  Scale Factor Determination of Micro-Machined Angular Rate Sensors Without a Turntable , 2006 .

[15]  A. Lal,et al.  NANOGAP ULTRASONIC ACTUATOR FOR NON-CONTACT CONTROL OF LEVITATED INERTIAL SENSOR ROTOR , 2012 .

[16]  Y. Gianchandani,et al.  Miniature Wireless Magnetoelastic Resonant Motor With Frequency Selectable Bidirectional Rotation , 2013, Journal of Microelectromechanical Systems.

[17]  S. E. Alper,et al.  Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes , 2012, Journal of Microelectromechanical Systems.

[18]  Andrew Richardson,et al.  Integrating testability into microsystems , 1997 .

[19]  Khalil Najafi,et al.  A micro vibratory stage for on chip physical stimulation and calibration of MEMS gyroscopes , 2014, 2014 International Symposium on Inertial Sensors and Systems (ISISS).

[20]  J.A. De Abreu-Garcia,et al.  Tracking control of a piezoceramic actuator with hysteresis compensation using inverse Preisach model , 2005, IEEE/ASME Transactions on Mechatronics.

[21]  Andrei M. Shkel.  Smart MEMS: micro-structures with error-suppression and self-calibration control capabilities , 2001, Proceedings of the 2001 American Control Conference. (Cat. No.01CH37148).

[22]  D. M. Rozelle,et al.  1 PPM precision self-calibration of scale factor in MEMS Coriolis vibratory gyroscopes , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[23]  Han Ding,et al.  Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation , 2013, IEEE/ASME Transactions on Mechatronics.

[24]  K. Najafi,et al.  Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon , 2013, IEEE Transactions on Electron Devices.

[25]  F. Ayazi,et al.  Electrostatic self-calibration of vibratory gyroscopes , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[26]  M. H. Kline,et al.  MEMS gyroscope bias drift cancellation using continuous-time mode reversal , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[27]  K. Najafi,et al.  A 3-DOF piezoelectric micro vibratory stage based on bulk-PZT/silicon crab-leg suspensions , 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

[28]  T. Link,et al.  A new self-test and self-calibration concept for micro-machined gyroscopes , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

[29]  K. Najafi,et al.  A 6-DOF piezoelectric micro vibratory stage based on multi-axis distributed-electrode excitation of PZT/Si unimorph T-beams , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

[30]  Robert Puers,et al.  RASTA—real-acceleration-for-self-test accelerometer: a new concept for self-testing accelerometers , 2002 .

[31]  Kenn Richard Oldham,et al.  Control and estimation with threshold sensing for Inertial Measurement Unit calibration using a piezoelectric microstage , 2014, 2014 American Control Conference.

[32]  Andrei M. Shkel,et al.  Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing , 2013 .