Strategy for the Control of a Dual-stage Nano-positioning System with a Single Metrology

A double-stage feedback control structure for a double-stage mechanical system, with a single optical metrology is developed to reach nanometer accuracy at high bandwidth over large displacements. A piezoelectric stack actuator is used for fine positioning, while a permanent magnet (PM) stepper motor handles the coarse positioning. Two different control approaches are compared for driving the PM stepper motor, while a classical PID controller is designed to drive the piezoelectric actuator. Since only a single measurement device is used, the references for both control loops (fine and coarse) must be appropriately obtained. An adequate control structure including a partial observer is designed so as to take into account the influence of the fine actuator on the position estimation of the coarse actuator. The complete control mechanism and strategy ensure the tracking of the real reference with sufficient accuracy and bandwidth

[1]  I. Mareels,et al.  Dual stage actuator control in hard disk drive - a review , 2003, IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468).

[2]  Ben M. Chen,et al.  Discrete-time LQG/LTR dual-stage controller design and implementation for high track density HDDs , 1999, Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251).

[3]  S. Koganezawa,et al.  Dual-stage actuator system for magnetic disk drives using a shear mode piezoelectric microactuator , 1999 .

[4]  Akira Sugawara,et al.  Stepping motors and their microprocessor controls , 1994 .

[5]  John N. Chiasson,et al.  High-performance nonlinear feedback control of a permanent magnet stepper motor , 1993, IEEE Trans. Control. Syst. Technol..

[6]  A. Lebrun,et al.  Feedback control of a permanent magnet stepper motor , 1997, ISIE '97 Proceeding of the IEEE International Symposium on Industrial Electronics.

[7]  R.A. de Callafon,et al.  Fixed order H/sub /spl infin// control design for dual-stage hard disk drives , 2000, Proceedings of the 39th IEEE Conference on Decision and Control (Cat. No.00CH37187).

[8]  Pragasen Pillay,et al.  Modeling, simulation, and analysis of permanent-magnet motor drives. I. The permanent-magnet synchronous motor drive , 1989 .

[9]  Takashi Kenjo,et al.  Stepping Motors and Their Microprocessor Controls , 1984 .

[10]  William C. Messner,et al.  On compensator design for linear time-invariant dual-input single-output systems , 2001 .

[11]  Chih-Lyang Hwang,et al.  Trajectory tracking of large-displacement piezoelectric actuators using a nonlinear observer-based variable structure control , 2005, IEEE Transactions on Control Systems Technology.

[12]  Murti V. Salapaka,et al.  High bandwidth nano-positioner: A robust control approach , 2002 .

[13]  R. Horowitz.  Track seek control for hard disk dual-stage servo systems , 2000, 2000 Asia-Pacific Magnetic Recording Conference. Digests of APMRC2000 on Mechanical and Manufacturing Aspects of HDD (Cat. No.00EX395).

[14]  Rong-Fong Fung,et al.  Dynamic responses of a precision positioning table impacted by a soft-mounted piezoelectric actuator , 2004 .

[15]  John Chiasson,et al.  Position control of a PM stepper motor by exact linearization , 1991 .

[16]  D. M. Auslander,et al.  Nanometer positioning of a linear motion stage under static loads , 1998 .

[17]  Ulf Holmberg,et al.  Hysteresis compensation of piezo actuators , 1999, 1999 European Control Conference (ECC).

[18]  M. Bodson,et al.  Experimental results of using an exact linearization controller on a PM stepper motor , 1990, 1990 IEEE International Conference on Systems Engineering.

[19]  B. Paden,et al.  Nonlinear inversion-based output tracking , 1996, IEEE Trans. Autom. Control..

[20]  H. Sira-Ramirez,et al.  Trajectory planning in the regulation of a PM stepper motor: a combined passivity and flatness approach , 2000, Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334).

[21]  Yiping Tang,et al.  A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation , 2003 .

[22]  B. Zhang,et al.  Developing a linear piezomotor with nanometer resolution and high stiffness , 1997 .

[23]  John Chiasson,et al.  Application of nonlinear control methods to the positioning of a permanent magnet stepper motor , 1989, Proceedings of the 28th IEEE Conference on Decision and Control,.