论文信息 - Stabilization of the 3C-SiC/SOI system by an intermediate silicon nitride layer - 字舞流文

Stabilization of the 3C-SiC/SOI system by an intermediate silicon nitride layer

S. Zappe | E. Obermeier | W. Skorupa | J. Stoemenos | H. Wirth | G. Krötz | H. Möller