Grating Couplers on Silicon Photonics: Design Principles, Emerging Trends and Practical Issues

Silicon photonics is an enabling technology that provides integrated photonic devices and systems with low-cost mass manufacturing capability. It has attracted increasing attention in both academia and industry in recent years, not only for its applications in communications, but also in sensing. One important issue of silicon photonics that comes with its high integration density is an interface between its high-performance integrated waveguide devices and optical fibers or free-space optics. Surface grating coupler is a preferred candidate that provides flexibility for circuit design and reduces effort for both fabrication and alignment. In the past decades, considerable research efforts have been made on in-plane grating couplers to address their insufficiency in coupling efficiency, wavelength sensitivity and polarization sensitivity compared with out-of-plane edge-coupling. Apart from improved performances, new functionalities are also on the horizon for grating couplers. In this paper, we review the current research progresses made on grating couplers, starting from their fundamental theories and concepts. Then, we conclude various methods to improve their performance, including coupling efficiency, polarization and wavelength sensitivity. Finally, we discuss some emerging research topics on grating couplers, as well as practical issues such as testing, packaging and promising applications.

[1]  D. Van Thourhout,et al.  Compact Focusing Grating Couplers for Silicon-on-Insulator Integrated Circuits , 2007, IEEE Photonics Technology Letters.

[2]  Chao Li,et al.  Bi-wavelength two dimensional chirped grating couplers for low cost WDM PON transceivers , 2011 .

[3]  Siegfried Janz,et al.  Waveguide grating coupler with subwavelength microstructures. , 2009, Optics letters.

[4]  Haoran Cui,et al.  Genetic-Algorithm-Optimized Wideband On-Chip Polarization Rotator with an Ultrasmall Footprint , 2017, 2018 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR).

[5]  T. Krauss,et al.  Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides , 2007, Journal of Lightwave Technology.

[6]  Wen Zhou,et al.  Tailorable dual-wavelength-band coupling in a transverse-electric-mode focusing subwavelength grating coupler. , 2018, Optics letters.

[7]  Chao Li,et al.  Efficient silicon nitride grating coupler with distributed Bragg reflectors. , 2014, Optics express.

[8]  Ole Sigmund,et al.  Topology optimization for nano‐photonics , 2011 .

[9]  Eli Yablonovitch,et al.  Inverse design of near unity efficiency perfectly vertical grating couplers. , 2017, Optics express.

[10]  Weijie Tang,et al.  Efficient adiabatic silicon-on-insulator waveguide taper , 2014 .

[11]  R. Baets,et al.  High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay. , 2006, Optics express.

[12]  Florian Merget,et al.  Visible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector. , 2013, Optics letters.

[13]  P. Verheyen,et al.  High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform. , 2010, Optics express.

[14]  W. Hsu,et al.  A low cost, label-free biosensor based on a novel double-sided grating waveguide coupler with sub-surface cavities , 2015 .

[15]  Roel Baets,et al.  Nanophotonic Waveguide Enhanced Raman Spectroscopy of Biological Submonolayers , 2016 .

[16]  Huihui Lu,et al.  Photonic Packaging: Transforming Silicon Photonic Integrated Circuits into Photonic Devices , 2016 .

[17]  Periklis Petropoulos,et al.  High-efficiency grating-couplers: demonstration of a new design strategy , 2017, Scientific Reports.

[18]  Ke Xu,et al.  Design of a barcode-like waveguide nanostructure for efficient chip–fiber coupling , 2016 .

[19]  Nicolas A. F. Jaeger,et al.  Apodized Focusing Fully Etched Subwavelength Grating Couplers , 2015, IEEE Photonics Journal.

[20]  Benjamin G. Lee,et al.  Polarization-independent nonuniform grating couplers on silicon-on-insulator. , 2015, Optics letters.

[21]  Xia Chen,et al.  Polarization-independent grating couplers for silicon-on-insulator nanophotonic waveguides. , 2011, Optics letters.

[22]  Optimization of fiber grating couplers on SOI using advanced search algorithms. , 2014, Optics letters.

[23]  Dingshan Gao,et al.  High Efficiency and Broadband Two-Dimensional Blazed Grating Coupler With Fully Etched Triangular Holes , 2012, Journal of Lightwave Technology.

[24]  Mingbin Yu,et al.  Silicon photonics packaging with lateral fiber coupling to apodized grating coupler embedded circuit. , 2014, Optics express.

[25]  Manfred Berroth,et al.  CMOS-Compatible Polarization Splitting Grating Couplers With a Backside Metal Mirror , 2013, IEEE Photonics Technology Letters.

[26]  M. Textor,et al.  Optical grating coupler biosensors. , 2002, Biomaterials.

[27]  Cosimo Lacava,et al.  Coupling strategies for silicon photonics integrated chips [Invited] , 2019, Photonics Research.

[28]  Zhiping Zhou,et al.  High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections , 2015 .

[29]  Ke Xu,et al.  Wideband subwavelength gratings for coupling between silicon-on-insulator waveguides and optical fibers. , 2012, Optics letters.

[30]  High-efficiency wideband SiNx-on-SOI grating coupler with low fabrication complexity. , 2017, Optics letters.

[31]  M. Heck Highly integrated optical phased arrays: photonic integrated circuits for optical beam shaping and beam steering , 2017 .

[32]  H. Tsang,et al.  Subwavelength Engineering in Silicon Photonic Devices , 2019, IEEE Journal of Selected Topics in Quantum Electronics.

[33]  Dries Vercruysse,et al.  Fully-automated optimization of grating couplers. , 2017, Optics express.

[34]  Yanfeng Chen,et al.  Highly efficient and perfectly vertical chip-to-fiber dual-layer grating coupler. , 2015, Optics express.

[35]  Siegfried Janz,et al.  Single-etch subwavelength engineered fiber-chip grating couplers for 1.3 µm datacom wavelength band. , 2016, Optics express.

[36]  A. Gnauck,et al.  Mode-Division Multiplexing Over 96 km of Few-Mode Fiber Using Coherent 6 $\,\times\,$6 MIMO Processing , 2012, Journal of Lightwave Technology.

[37]  Ali Adibi,et al.  High-efficiency and Wideband Interlayer Grating Couplers in Multilayer Si/sio 2 /sin Platform for 3d Integration of Optical Functionalities References and Links , 2022 .

[38]  Shon Schmidt,et al.  Sub-wavelength grating for enhanced ring resonator biosensor. , 2016, Optics express.

[39]  Guifang Li,et al.  Efficient Grating Couplers for Space Division Multiplexing Applications , 2018, IEEE Journal of Selected Topics in Quantum Electronics.

[40]  Zhiping Zhou,et al.  High-performance and compact binary blazed grating coupler based on an asymmetric subgrating structure and vertical coupling. , 2011, Optics letters.

[41]  Jesse Lu,et al.  Nanophotonic computational design. , 2013, Optics express.

[42]  C. Greiner,et al.  Interferometric amplitude apodization of integrated gratings. , 2005, Optics express.

[43]  John Bowers,et al.  Heterogeneous silicon photonics sensing for autonomous cars. , 2019, Optics express.

[44]  Robert Halir,et al.  Subwavelength-Grating Metamaterial Structures for Silicon Photonic Devices , 2018, Proceedings of the IEEE.

[45]  Wen Zhou,et al.  3 × 104 Gb/s Single-λ Interconnect of Mode-Division Multiplexed Network With a Multicore Fiber , 2018, Journal of Lightwave Technology.

[46]  Xinliang Zhang,et al.  Two-dimensional silicon photonic grating coupler with low polarization-dependent loss and high tolerance. , 2019, Optics express.

[47]  Eli Yablonovitch,et al.  Numerical optimization of a grating coupler for the efficient excitation of surface plasmons at an Ag-SiO 2 interface , 2007, physics/0703036.

[48]  I Molina-Fernández,et al.  Polarization-independent grating coupler for micrometric silicon rib waveguides. , 2012, Optics letters.

[49]  Guo-Qiang Lo,et al.  Wide bandwidth and high coupling efficiency Si3N4-on-SOI dual-level grating coupler. , 2014, Optics express.

[50]  Hon Ki Tsang,et al.  Experimental demonstration of polarization-insensitive air-cladding grating couplers for silicon-on-insulator waveguides. , 2014, Optics letters.

[51]  D. Taillaert,et al.  A compact two-dimensional grating coupler used as a polarization splitter , 2003, IEEE Photonics Technology Letters.

[52]  G. Nordin,et al.  Embedded slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides , 2005, IEEE Photonics Technology Letters.

[53]  Zhiping Zhou,et al.  Development trends in silicon photonics for data centers , 2018, Optical Fiber Technology.

[54]  Hans Sohlström,et al.  High efficiency silicon nitride surface grating couplers. , 2008, Optics express.

[55]  Guo-Qiang Lo,et al.  Silicon photonic platforms for mid-infrared applications [Invited] , 2017 .

[56]  Siegfried Janz,et al.  Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers. , 2010, Optics letters.

[57]  Michael R. Watts,et al.  Large-scale nanophotonic phased array , 2013, Nature.

[58]  Alec M. Hammond,et al.  Designing integrated photonic devices using artificial neural networks. , 2018, Optics express.

[59]  Dominic Goodwill,et al.  Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices , 2018, Proceedings of the IEEE.

[60]  Pavel Cheben,et al.  High-efficiency apodized-imaging chip-fiber grating coupler for silicon nitride waveguides. , 2016, Optics letters.

[61]  Wei Shi,et al.  Design of broadband subwavelength grating couplers with low back reflection. , 2015, Optics letters.

[62]  A. Peruzzo,et al.  High coupling efficiency grating couplers on lithium niobate on insulator. , 2019, Optics express.

[63]  R. Baets,et al.  Compact efficient broadband grating coupler for silicon-on-insulator waveguides. , 2004, Optics letters.

[64]  Young-Kai Chen,et al.  Wide Bandwidth Silicon Nitride Grating Coupler , 2010, IEEE Photonics Technology Letters.

[65]  Pavel Cheben,et al.  L-shaped fiber-chip grating couplers with high directionality and low reflectivity fabricated with deep-UV lithography. , 2017, Optics letters.

[66]  J. Xu,et al.  Silicon Photonic Integrated Circuit Mode Multiplexer , 2013, IEEE Photonics Technology Letters.

[67]  Yikai Su,et al.  Silicon High-Order Mode (De)Multiplexer on Single Polarization , 2018, Journal of Lightwave Technology.

[68]  I Molina-Fernández,et al.  Fiber-chip grating coupler based on interleaved trenches with directionality exceeding 95. , 2014, Optics letters.

[69]  D. Thomson,et al.  High-efficiency apodized bidirectional grating coupler for perfectly vertical coupling. , 2019, Optics letters.

[70]  Siegfried Janz,et al.  Fiber-chip edge coupler with large mode size for silicon photonic wire waveguides. , 2016, Optics express.

[71]  Daoxin Dai,et al.  Silicon Nanophotonic Integrated Devices for On-Chip Multiplexing and Switching , 2017, Journal of Lightwave Technology.

[72]  Pavel Cheben,et al.  Experimental demonstration of an apodized-imaging chip-fiber grating coupler for Si3N4 waveguides. , 2017, Optics letters.

[73]  Chao Li,et al.  Etched Waveguide Grating Variable 1 $\,\times\,$ 2 Splitter/Combiner and Waveguide Coupler , 2009 .

[74]  P. Cheben,et al.  Subwavelength waveguide grating for mode conversion and light coupling in integrated optics. , 2006, Optics express.

[75]  Xianshu Luo,et al.  Multi-layer silicon nitride-on-silicon polarization-independent grating couplers. , 2018, Optics express.

[76]  Roel Baets,et al.  High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers. , 2007, Optics letters.

[77]  Roel Baets,et al.  Stimulated Raman spectroscopy of analytes evanescently probed by a silicon nitride photonic integrated waveguide. , 2018, Optics letters.

[78]  J. R. Salazar-Gil,et al.  Mode-selective photonic lanterns for space-division multiplexing. , 2014, Optics express.

[79]  Siyuan Yu,et al.  Low-loss two-dimensional silicon photonic grating coupler with a backside metal mirror. , 2018, Optics letters.

[80]  Jelena Vucković,et al.  Inverse design in nanophotonics , 2018, Nature Photonics.

[81]  Yu Yu,et al.  Single step etched two dimensional grating coupler based on the SOI platform. , 2015, Optics express.

[82]  R. Baets,et al.  Focused-Ion-Beam Fabrication of Slanted Grating Couplers in Silicon-on-Insulator Waveguides , 2007, IEEE Photonics Technology Letters.

[83]  Yi Wang,et al.  Highly compact polarization-independent grating coupler. , 2010, Optics letters.

[84]  Sailong Wu,et al.  Edge Couplers in Silicon Photonic Integrated Circuits: A Review , 2020, Applied Sciences.

[85]  I. Molina-Fernandez,et al.  High-Performance Multimode Interference Coupler in Silicon Waveguides With Subwavelength Structures , 2011, IEEE Photonics Technology Letters.

[86]  Sylvie Menezo,et al.  Silicon nitride-on-silicon bi-layer grating couplers designed by a global optimization method. , 2018, Optics express.

[87]  Shengli Chang,et al.  Polarization-independent grating coupler based on silicon-on-insulator , 2015 .

[88]  S. Selvaraja,et al.  On-chip unidirectional dual-band fiber-chip grating coupler in silicon nitride , 2018, OSA Continuum.

[89]  Siegfried Janz,et al.  Subwavelength index engineered surface grating coupler with sub-decibel efficiency for 220-nm silicon-on-insulator waveguides. , 2015, Optics express.

[90]  Roel Baets,et al.  Open-Access Silicon Photonics: Current Status and Emerging Initiatives , 2018, Proceedings of the IEEE.

[91]  Li Zhu,et al.  Very high efficiency optical coupler for silicon nanophotonic waveguide and single mode optical fiber. , 2017, Optics express.

[92]  Jing Xu,et al.  Compact double-part grating coupler for higher-order mode coupling. , 2018, Optics letters.

[93]  Glen Kramer,et al.  Ethernet passive optical network (EPON): building a next-generation optical access network , 2002, IEEE Commun. Mag..

[94]  X. Zhang,et al.  Two-dimensional grating coupler on silicon with a high coupling efficiency and a low polarization-dependent loss. , 2020, Optics express.

[95]  David J Thomson,et al.  Dual-etch apodised grating couplers for efficient fibre-chip coupling near 1310 nm wavelength. , 2017, Optics express.

[96]  Shankar Kumar Selvaraja,et al.  Grating-Assisted Fiber to Chip Coupling for SOI Photonic Circuits , 2018, Applied Sciences.

[97]  Nan Zhang,et al.  Very sharp adiabatic bends based on an inverse design. , 2018, Optics letters.

[98]  Yixiao Zhu,et al.  Bridged Coupler and Oval Mode Converter Based Silicon Mode Division (De)Multiplexer and Terabit WDM-MDM System Demonstration , 2018, Journal of Lightwave Technology.

[99]  Haoshuo Chen,et al.  Silicon Photonic Integrated Mode Multiplexer and Demultiplexer , 2012, IEEE Photonics Technology Letters.

[100]  Siegfried Janz,et al.  High-directionality fiber-chip grating coupler with interleaved trenches and subwavelength index-matching structure. , 2015, Optics letters.

[101]  Roel Baets,et al.  Silicon-on-insulator ultra-compact duplexer based on a diffractive grating structure. , 2007, Optics express.

[102]  Di Liang,et al.  Recent progress in lasers on silicon , 2010 .

[103]  Siegfried Janz,et al.  High‐efficiency single etch step apodized surface grating coupler using subwavelength structure , 2014 .

[104]  K. Petermann,et al.  A Two-Dimensional Fiber Grating Coupler on SOI for Mode Division Multiplexing , 2016, IEEE Photonics Technology Letters.

[105]  Juerg Leuthold,et al.  Perpendicular Grating Coupler Based on a Blazed Antiback-Reflection Structure , 2017, Journal of Lightwave Technology.

[106]  Siegfried Janz,et al.  Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure. , 2010, Optics letters.

[107]  Douglas D. Coolbaugh,et al.  SiNx bilayer grating coupler for photonic systems , 2018, OSA Continuum.

[108]  Ali Hajimiri,et al.  Binary particle swarm optimized 2  ×  2 power splitters in a standard foundry silicon photonic platform. , 2016, Optics letters.

[109]  Sailing He,et al.  Proposal for a Grating Waveguide Serving as Both a Polarization Splitter and an Efficient Coupler for Silicon-on-Insulator Nanophotonic Circuits , 2009 .

[110]  Dries Vercruysse,et al.  Inverse Design and Demonstration of Broadband Grating Couplers , 2018, IEEE Journal of Selected Topics in Quantum Electronics.

[111]  Lech Wosinski,et al.  Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits. , 2010, Optics letters.

[112]  B. Shen,et al.  An integrated-nanophotonics polarization beamsplitter with 2.4 × 2.4 μm2 footprint , 2015, Nature Photonics.

[113]  Edward A. Watson,et al.  A Review of Phased Array Steering for Narrow-Band Electrooptical Systems , 2009, Proceedings of the IEEE.

[114]  R Orobtchouk,et al.  Silicon Photonic Circuits: On-CMOS Integration, Fiber Optical Coupling, and Packaging , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[115]  Siegfried Janz,et al.  Waveguide sub‐wavelength structures: a review of principles and applications , 2015 .

[116]  Y. Tong,et al.  Efficient Mode Multiplexer for Few-Mode Fibers Using Integrated Silicon-on-Insulator Waveguide Grating Coupler , 2020, IEEE Journal of Quantum Electronics.

[117]  H. Tsang,et al.  Dual-wavelength-band subwavelength grating coupler operating in the near infrared and extended shortwave infrared. , 2019, Optics letters.

[118]  Apodized silicon photonic grating couplers for mode-order conversion , 2019, Photonics Research.

[119]  Wen Zhou,et al.  Efficient perfectly vertical grating coupler for multi-core fibers fabricated with 193  nm DUV lithography. , 2018, Optics letters.

[120]  J. Leuthold,et al.  Compact, ultra-broadband plasmonic grating couplers. , 2019, Optics express.

[121]  Jens H. Schmid,et al.  Roadmap on silicon photonics , 2016 .

[122]  Michael Hochberg,et al.  A compact bi-wavelength polarization splitting grating coupler fabricated in a 220 nm SOI platform. , 2013, Optics express.

[123]  Huanyu Lu,et al.  Subwavelength TE/TM grating coupler based on silicon-on-insulator , 2015 .

[124]  Kunimasa Saitoh,et al.  Multicore fiber technology , 2015, 2015 Optical Fiber Communications Conference and Exhibition (OFC).

[125]  Yu Yu,et al.  Two-dimensional grating coupler with a low polarization dependent loss of 0.25  dB covering the C-band. , 2016, Optics letters.

[126]  Feng Luan,et al.  Design for broadband high-efficiency grating couplers. , 2012, Optics letters.

[127]  Siyuan Yu,et al.  High-efficiency hybrid amorphous silicon grating couplers for sub-micron-sized lithium niobate waveguides. , 2018, Optics express.

[128]  Yuki Atsumi,et al.  50 Gbps data transmission through amorphous silicon interlayer grating couplers with metal mirrors , 2014 .

[129]  Haisheng Rong,et al.  High-performance silicon-on-insulator grating coupler with completely vertical emission. , 2015, Optics express.

[130]  P. Berini,et al.  Grating couplers fabricated by e-beam lithography for long-range surface plasmon waveguides embedded in a fluoropolymer. , 2019, Applied optics.

[131]  David J. Thomson,et al.  Silicon optical modulators , 2010 .

[132]  Michal Lipson,et al.  WDM-compatible mode-division multiplexing on a silicon chip , 2014, Nature Communications.

[133]  Pavel Cheben,et al.  Broadband fiber-chip zero-order surface grating coupler with 0.4  dB efficiency. , 2016, Optics letters.

[134]  Hon Ki Tsang,et al.  Fabrication-Tolerant Waveguide Chirped Grating Coupler for Coupling to a Perfectly Vertical Optical Fiber , 2008, IEEE Photonics Technology Letters.

[135]  P. O'Brien,et al.  Packaging Process for Grating-Coupled Silicon Photonic Waveguides Using Angle-Polished Fibers , 2013, IEEE Transactions on Components, Packaging and Manufacturing Technology.

[136]  Guo-Qiang Lo,et al.  CMOS compatible monolithic multi-layer Si₃N₄₋ on-SOI platform for low-loss high performance silicon photonics dense integration. , 2014, Optics express.

[137]  Toshio Morioka,et al.  On-chip grating coupler array on the SOI platform for fan-in/fan-out of MCFs with low insertion loss and crosstalk. , 2015, Optics express.

[138]  Silicon waveguide grating coupler for perfectly vertical fiber based on a tilted membrane structure. , 2016, Optics letters.

[139]  Juerg Leuthold,et al.  2-D Grating Couplers for Vertical Fiber Coupling in Two Polarizations , 2019, IEEE Photonics Journal.

[140]  Lei Liu,et al.  Ultra efficient silicon nitride grating coupler with bottom grating reflector. , 2015, Optics express.

[141]  Guo-Qiang Lo,et al.  A High-Efficiency Nonuniform Grating Coupler Realized With 248-nm Optical Lithography , 2013, IEEE Photonics Technology Letters.