论文信息 - Secondary Electron Measurement with Auger Electron Microprobe. I. Calibration of the CMA in the Low-Energy Region

Secondary Electron Measurement with Auger Electron Microprobe. I. Calibration of the CMA in the Low-Energy Region

The characteristics of the cylindrical mirror analyzer (CMA) attached to a commercial-type scanning Auger electron microprobe, JAMP-3, were examined for its possible use in monitoring the variation of surface properties through the measurement of the energy distribution of secondary electrons, the Ns(E)-spectrum. For this purpose, a special compact electron gun, small enough to be attached inside a sample holder, was made to calibrate the energy scale of the CMA, and a special arrangement for sample setting was devised to measure the Ns(E)-spectra. This arrangement enables the variation of surface potential to be detected throught the shift of the cut-off point of the Ns(E)-spectrum with as good accuracy as can be obtained by an ESCA-system.

I. Ogoh | R. Shimizu | H. Hashimoto

[1] C. Gressus,et al. Variation of relative intensities between surface and bulk plasmon losses due to crystal orientations for aluminium in low energy electron reflection loss spectroscopy , 1981 .