论文信息 - Study of a micro chamber quadrupole mass spectrometer

Study of a micro chamber quadrupole mass spectrometer

Copyright @ 2008 American Vacuum Society / American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films, 26(2), Article number 239 and may be found at http://scitation.aip.org/content/avs/journal/jvsta/26/2/10.1116/1.2827512.

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