论文信息 - Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films

Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films

Real-time spectroscopic ellipsometry with an ultraviolet-extended spectral range (1.5–6.5 eV) has been applied to investigate the sputter deposition of boron nitride (BN) thin films with high cubic content in terms of a two-layer optical model. In this model, the inner and outer layers represent sp2- and sp3-bonded BN (hBN and cBN), respectively. The thickness evolution of the two layers as well as their dielectric functions over the extended spectral range have been determined.

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