Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab
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William D. Hinsberg | Chris Bencher | Hoa D. Truong | Yongmei Chen | Liyan Miao | Daniel P. Sanders | Melia Tjio | Jeffrey Smith | Cathy Cai | Joy Y. Cheng | Steven Holmes | W. Hinsberg | S. Holmes | H. Truong | D. Sanders | C. Bencher | Yongmei Chen | Melia Tjio | Cathy Cai | Liyan Miao | Jeffrey T. Smith
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