3D DfT architecture for pre-bond and post-bond testing

Process technology developments enable the creation of three-dimensional stacked ICs (3D-SICs) interconnected by means of Through-Silicon Vias (TSVs). This paper presents a 3D Design-for-Test (DfT) architecture for such 3D-SICs that allows pre-bond die testing as well as post-bond stack testing of both partial and complete stacks. The architecture enables on a modular test approach, in which the various dies, their embedded IP cores, the inter-die TSV-based interconnects, and the external I/Os can be tested as separate units to allow flexible optimization of the 3D-SIC test flow. The architecture builds on and reuses existing DfT hardware at the core, die, and product level. Its main new component is a die-level wrapper, which can be based on either IEEE Std 1500 or IEEE Std 1149.1. The paper presents a conceptual overview of the architecture, as well as implementation aspects. Experimental results show that the implementation costs are negligible for medium to large dies.

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