Erbium ion implantation doping of opto-electronic materials operating at 1.5 mu m

Soda-lime silicate and Al/sub 2/O/sub 3/ waveguide films, LiNbO/sub 3/ single crystal, as well as crystal Si are doped with erbium by ion implantation. All materials show luminescence at 1.5 mu m, characteristic for Er, with lifetimes up to 12 ms