Role of hydrogen in evolution of plasma parameters and dust growth in capacitively coupled dusty plasmas
暂无分享,去创建一个
[1] M. Kondo,et al. Transient Phenomena in Plasma-Enhanced Chemical Vapor Deposition Processes of Thin-Film Silicon , 2010 .
[2] C. Cavallotti,et al. Plasma Composition and Kinetic Reaction Rates in a LEPECVD Ar-SiH4-H2 Plasma During nc-Si Films Deposition for Photovoltaic Applicationss , 2009 .
[3] S. Pizzini,et al. Crystallinity and microstructure in Si films grown by plasma-enhanced chemical vapor deposition: A simple atomic-scale model validated by experiments , 2009 .
[4] W. Choe,et al. Density measurement of particles in rf silane plasmas by the multipass laser extinction method , 2007 .
[5] Chin-Wook Chung,et al. Floating probe for electron temperature and ion density measurement applicable to processing plasmas , 2007 .
[6] Shuyan Xu,et al. Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas , 2003 .
[7] D. Das,et al. Role of hydrogen in controlling the growth of μc-Si:H films from argon diluted SiH4 plasma , 2002 .
[8] K. Koga,et al. Effects of Gas Temperature Gradient, Pulse Discharge Modulation, and Hydrogen Dilution on Particle Growth in Silane RF Discharges , 2000 .
[9] J. Winter. Dust in fusion devices - experimental evidence, possible sources and consequences , 1998 .
[10] A. Bouchoule,et al. Electrical characterization and modeling of a dust forming plasma in a radio frequency discharge , 1996 .
[11] H. Ohkura,et al. Growth processes of particles in high frequency silane plasmas , 1996 .
[12] J. Perrin,et al. Possible routes for cluster growth and particle formation in RF silane discharges , 1994 .
[13] G. Selwyn,et al. Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena , 1991 .
[14] C. Goertz,et al. Dusty plasmas in the solar system , 1989 .
[15] Mark J. Kushner,et al. A model for the discharge kinetics and plasma chemistry during plasma enhanced chemical vapor deposition of amorphous silicon , 1988 .